Invention Application
- Patent Title: TREATING VESSEL AND LIQUID PROCESSING APPARATUS
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Application No.: US17486060Application Date: 2021-09-27
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Publication No.: US20220102169A1Publication Date: 2022-03-31
- Inventor: Dae Sung KIM , Sang Eun NOH , Ho Jin JANG , Jae Hoon PARK
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si,
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si,
- Priority: KR10-2020-0126540 20200929
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; H01L21/673 ; H01L21/02

Abstract:
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus comprising: a treating vessel including an outer cup and an inner cup placed in an inner side of the outer cup, the inner cup and the outer cup in combination defining a recollecting route for a recollecting a liquid; a rotatable spin head placed within the treating vessel on which a cleaning jig is placed; wherein the treating vessel comprises a first protrusion protruding from an inner side surface of the outer cup to direct a cleaning liquid scattering from the cleaning jig toward a surface of the inner cup.
Information query
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