- 专利标题: QUANTUM DOT DEVICES WITH SINGLE ELECTRON TRANSISTOR DETECTORS
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申请号: US17578693申请日: 2022-01-19
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公开(公告)号: US20220140086A1公开(公告)日: 2022-05-05
- 发明人: Hubert C. George , Ravi Pillarisetty , Nicole K. Thomas , Jeanette M. Roberts , James S. Clarke
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L29/12
- IPC分类号: H01L29/12 ; H01L29/423 ; H01L29/76 ; H01L29/82 ; H01L29/66 ; H01L29/775
摘要:
Disclosed herein are quantum dot devices with single electron transistor (SET) detectors. In some embodiments, a quantum dot device may include: a quantum dot formation region; a group of gates disposed on the quantum dot formation region, wherein the group of gates includes at least first, second, and third gates, spacers are disposed on sides of the first and second gates, wherein a first spacer is disposed on a side of the first gate proximate to the second gate, and a second spacer, physically separate from the first spacer, is disposed on a side of the second gate proximate to the first gate, and the third gate is disposed between the first and second gates and extends between the first and second spacers; and a SET disposed on the quantum dot formation region, proximate to the group of gates.
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