Invention Application
- Patent Title: ACTIVE MATRIX SUBSTRATE AND MANUFACTURING METHOD THEREOF
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Application No.: US17665750Application Date: 2022-02-07
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Publication No.: US20220157855A1Publication Date: 2022-05-19
- Inventor: Hajime IMAI , Tohru DAITOH , Tetsuo KIKUCHI , Masamitsu YAMANAKA , Yoshihito HARA , Tatsuya KAWASAKI , Masahiko SUZUKI , Setsuji NISHIMIYA
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai City
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Sakai City
- Priority: JP2019-068403 20190329
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/24 ; H01L29/417 ; H01L29/786 ; H01L21/02 ; H01L21/465 ; H01L29/66 ; G02F1/1368 ; G02F1/1362 ; G02F1/1343

Abstract:
The oxide semiconductor layer is electrically connected to a source electrode or the source bus line within the source opening formed in the lower insulating layer, each wiring line connection section includes a lower conductive portion formed using the first conductive film, the lower insulating layer extending over the lower conductive portion, an oxide connection layer formed using an oxide film the same as the oxide semiconductor layer and electrically connected to the lower conductive portion within the lower opening formed in the lower insulating layer, an insulating layer covering the oxide connection layer, and an upper conductive portion electrically connected to the oxide connection layer within the upper opening formed in the insulating layer, wherein the oxide connection layer includes a region lower in a specific resistance than the channel region of the oxide semiconductor layer.
Public/Granted literature
- US11721704B2 Active matrix substrate Public/Granted day:2023-08-08
Information query
IPC分类: