Invention Application
- Patent Title: IMAGE SENSOR AND MANUFACTURING METHOD THEREOF
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Application No.: US17327996Application Date: 2021-05-24
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Publication No.: US20220231058A1Publication Date: 2022-07-21
- Inventor: Min-Feng Kao , Dun-Nian Yaung , Jen-Cheng Liu , Wen-Chang Kuo , Sheng-Chau Chen , Feng-Chi Hung , Sheng-Chan Li
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor includes a pixel and an isolation structure. The pixel includes a photosensitive region and a circuitry region next to the photosensitive region. The isolation structure is located over the pixel, where the isolation structure includes a conductive grid and a dielectric structure covering a sidewall of the conductive grid, and the isolation structure includes an opening or recess overlapping the photosensitive region. The isolation structure surrounds a peripheral region of the photosensitive region.
Public/Granted literature
- US11908878B2 Image sensor and manufacturing method thereof Public/Granted day:2024-02-20
Information query
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