Invention Application
- Patent Title: DRAM DEVICE INCLUDING AN AIR GAP AND A SEALING LAYER
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Application No.: US17723218Application Date: 2022-04-18
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Publication No.: US20220246620A1Publication Date: 2022-08-04
- Inventor: Yoongoo KANG , Wonseok YOO , Hokyun AN , Kyungwook PARK , Dain LEE
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2019-0105873 20190828
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C5/06 ; H01L29/06

Abstract:
A DRAM device includes an isolation region defining source and drain regions in a substrate, a first bit line structure connected to the source region, a second bit line structure disposed on the isolation region, an inner spacer vertically extending on a first sidewall of the first bit line structure, an air gap is between the inner spacer and an outer spacer, a storage contact between the first and second bit line structures and connected to the drain region, a landing pad structure vertically on the storage contact, and a storage structure vertically on the landing pad structure. The sealing layer seals a top of the first air gap. The sealing layer includes a first sealing layer on a first sidewall of a pad isolation trench, and a second sealing layer on a second sidewall of the pad isolation trench and separated from the first sealing layer.
Public/Granted literature
- US11729966B2 DRAM device including an air gap and a sealing layer Public/Granted day:2023-08-15
Information query
IPC分类: