Invention Grant
- Patent Title: DRAM device including an air gap and a sealing layer
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Application No.: US17723218Application Date: 2022-04-18
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Publication No.: US11729966B2Publication Date: 2023-08-15
- Inventor: Yoongoo Kang , Wonseok Yoo , Hokyun An , Kyungwook Park , Dain Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR 20190105873 2019.08.28
- Main IPC: H10B12/00
- IPC: H10B12/00 ; G11C5/06 ; H01L29/06

Abstract:
A DRAM device includes an isolation region defining source and drain regions in a substrate, a first bit line structure connected to the source region, a second bit line structure disposed on the isolation region, an inner spacer vertically extending on a first sidewall of the first bit line structure, an air gap is between the inner spacer and an outer spacer, a storage contact between the first and second bit line structures and connected to the drain region, a landing pad structure vertically on the storage contact, and a storage structure vertically on the landing pad structure. The sealing layer seals a top of the first air gap. The sealing layer includes a first sealing layer on a first sidewall of a pad isolation trench, and a second sealing layer on a second sidewall of the pad isolation trench and separated from the first sealing layer.
Public/Granted literature
- US20220246620A1 DRAM DEVICE INCLUDING AN AIR GAP AND A SEALING LAYER Public/Granted day:2022-08-04
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