Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICE AND OPERATING METHOD THEREOF
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Application No.: US17666448Application Date: 2022-02-07
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Publication No.: US20220271057A1Publication Date: 2022-08-25
- Inventor: Sang-Yong PARK , Jin-Hong PARK , Sungjoo LEE
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2021-0025467 20210225
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L29/51 ; H01L29/78

Abstract:
A semiconductor memory device capable of improving performance by the use of a charge storage layer including a ferroelectric material is provided. The semiconductor memory device includes a substrate, a tunnel insulating layer contacting the substrate, on the substrate, a charge storage layer contacting the tunnel insulating layer and including a ferroelectric material, on the tunnel insulating layer, a barrier insulating layer contacting the charge storage layer, on the charge storage layer, and a gate electrode contacting the barrier insulating layer, on the barrier insulating layer.
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