Invention Application
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE INCLUDING DISCRETE CHARGE STORAGE ELEMENTS AND METHODS FOR FORMING THE SAME
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Application No.: US17189153Application Date: 2021-03-01
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Publication No.: US20220278216A1Publication Date: 2022-09-01
- Inventor: Xue Bai PITNER , Raghuveer S. MAKALA , Fei ZHOU , Senaka KANAKAMEDALA , Ramy Nashed Bassely SAID
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX ADDISON
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX ADDISON
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L27/11556 ; H01L27/11582 ; H01L27/11597 ; H01L29/78 ; H01L21/28

Abstract:
A memory device includes an alternating stack of insulating layers and electrically conductive layers, a memory opening vertically extending through the alternating stack, and memory opening fill structures located in the memory opening and including a vertical semiconductor channel, a dielectric material liner laterally surrounding the vertical semiconductor channel, and a vertical stack of discrete memory elements laterally surrounding the dielectric material liner. A subset of the insulating layers a lower insulating sublayer, an upper insulating sublayer overlying the lower insulating sublayer, and a center insulating sublayer located between and in contact with the lower insulating sublayer and the upper insulating sublayer.
Public/Granted literature
- US11749736B2 Three-dimensional memory device including discrete charge storage elements and methods for forming the same Public/Granted day:2023-09-05
Information query
IPC分类: