Invention Application
- Patent Title: CONTROL OF PROCESSING PARAMETERS FOR SUBSTRATE POLISHING WITH SUBSTRATE PRECESSION
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Application No.: US17681673Application Date: 2022-02-25
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Publication No.: US20220283554A1Publication Date: 2022-09-08
- Inventor: Eric Lau , Charles C. Garretson , Huanbo Zhang , Zhize Zhu , Benjamin Cherian , Brian J. Brown , Thomas H. Osterheld
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G05B13/04
- IPC: G05B13/04 ; B24B49/00 ; B24B49/12 ; B24B49/16 ; B24B37/005

Abstract:
Generating a recipe for a polishing process includes receiving a target removal profile that includes a target thickness to remove for locations spaced angularly around a center of a substrate, storing a first function providing substrate orientation relative to a carrier head over time, storing a second function defining a polishing rate below a zone of the zone as a function of one or more pressures of one or more zones of the carrier head, and for each particular zone of the plurality of zones, calculate a recipe defining a pressure for the particular zone over time. Calculating the recipe includes calculating an expected thickness profile after polishing from the second function defining the polishing rate and the first function providing substrate orientation relative to the zone over time, and applying a minimizing algorithm to reduce a difference between the expected thickness profile and the target thickness profile.
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