发明申请
- 专利标题: CONTROL OF PROCESSING PARAMETERS FOR SUBSTRATE POLISHING WITH SUBSTRATE PRECESSION
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申请号: US17681673申请日: 2022-02-25
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公开(公告)号: US20220283554A1公开(公告)日: 2022-09-08
- 发明人: Eric Lau , Charles C. Garretson , Huanbo Zhang , Zhize Zhu , Benjamin Cherian , Brian J. Brown , Thomas H. Osterheld
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: G05B13/04
- IPC分类号: G05B13/04 ; B24B49/00 ; B24B49/12 ; B24B49/16 ; B24B37/005
摘要:
Generating a recipe for a polishing process includes receiving a target removal profile that includes a target thickness to remove for locations spaced angularly around a center of a substrate, storing a first function providing substrate orientation relative to a carrier head over time, storing a second function defining a polishing rate below a zone of the zone as a function of one or more pressures of one or more zones of the carrier head, and for each particular zone of the plurality of zones, calculate a recipe defining a pressure for the particular zone over time. Calculating the recipe includes calculating an expected thickness profile after polishing from the second function defining the polishing rate and the first function providing substrate orientation relative to the zone over time, and applying a minimizing algorithm to reduce a difference between the expected thickness profile and the target thickness profile.
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