Invention Application
- Patent Title: INKJET PLATFORM FOR FABRICATION OF OPTICAL FILMS AND STRUCTURES
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Application No.: US17647820Application Date: 2022-01-12
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Publication No.: US20220363064A1Publication Date: 2022-11-17
- Inventor: Daihua ZHANG , Ludovic Godet , Michael David-Scott Kemp , Kang Luo , Kazuya Daito , Kenneth S. Ledford , Bahubali S. Upadhye , Hemantha Raju , John Rusconi , Elsa Massonneau , Mahendran Chidambaram , Alexey Stepanov , Visweswaren Sivaramakrishnan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Priority: IN202141021237 20210511
- Main IPC: B41J2/175
- IPC: B41J2/175

Abstract:
Embodiments described herein relate to an inkjet printing platform. The inkjet printing platform is utilized for fabrication of optical films and optical device structures. The inkjet printing platform includes a transfer chamber, one or more inkjet chambers, a plurality of auxiliary modules, a substrate flipper, and load ports. The inkjet printing platform is operable to perform an inkjet printing process on a substrate to form an optical film and/or an optical device.
Public/Granted literature
- US11878532B2 Inkjet platform for fabrication of optical films and structures Public/Granted day:2024-01-23
Information query
IPC分类: