Invention Application
- Patent Title: POLYSILICON REMOVAL IN WORD LINE CONTACT REGION OF MEMORY DEVICES
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Application No.: US17815043Application Date: 2022-07-26
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Publication No.: US20220367495A1Publication Date: 2022-11-17
- Inventor: Yen-Jou WU , Chih-Ming LEE , Keng-Ying LIAO , Ping-Pang Hsieh , Su-Yu YEH , Hsin-Hui LIN , Yu-Liang WANG
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L27/11524
- IPC: H01L27/11524 ; H01L27/11519 ; H01L29/788 ; H01L29/423 ; H01L29/66 ; G11C8/14

Abstract:
The present disclosure describes a patterning process for a strap region in a memory cell for the removal of material between polysilicon lines. The patterning process includes depositing a first hard mask layer in a divot formed on a top portion of a polysilicon layer interposed between a first polysilicon gate structure and a second polysilicon gate; depositing a second hard mask layer on the first hard mask layer. The patterning process also includes performing a first etch to remove the second hard mask layer and a portion of the second hard mask layer from the divot; performing a second etch to remove the second hard mask layer from the divot; and performing a third etch to remove the polysilicon layer not covered by the first and second hard mask layers to form a separation between the first polysilicon gate structure and the second polysilicon structure.
Public/Granted literature
- US12041771B2 Polysilicon removal in word line contact region of memory devices Public/Granted day:2024-07-16
Information query
IPC分类: