Invention Application
- Patent Title: LASER MACHINING APPARATUS AND LASER MACHINING METHOD
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Application No.: US17588535Application Date: 2022-01-31
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Publication No.: US20220384219A1Publication Date: 2022-12-01
- Inventor: Heung Yeol NA , Tae Hun KIM , Jung Woo CHOI
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2021-0070516 20210601
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B23K26/00 ; B65H23/00 ; B65H75/44 ; B23K26/12 ; B23K26/16

Abstract:
A laser machining apparatus includes, a processing chamber, a window disposed in a surface of the processing chamber, a substrate carrier disposed inside the processing chamber and facing the window, a laser irradiator which irradiates a laser onto the substrate carrier through the window, a protector supplier disposed on a side of the processing chamber, a protector retriever disposed on an opposite side of the processing chamber opposite to the side of the processing chamber, and a protector which connects the protector supplier with the protector retriever, where at least a portion of the protector is disposed between the substrate carrier and the window in the processing chamber.
Public/Granted literature
- US12237185B2 Laser machining apparatus and laser machining method Public/Granted day:2025-02-25
Information query
IPC分类: