公开(公告)号：US20210028047A1

公开(公告)日：2021-01-28

申请号：US16909956

申请日：2020-06-23

Applicant: Samsung Display Co., Ltd.

Inventor： Heung Yeol NA ,  Kang Won LEE ,  Yoon Jae LEE

IPC: H01L21/683 ,  H01L21/67 ,  H01L25/075 ,  H01L33/62 ,  B25J9/02 ,  B25J15/00 ,  B25J9/00

Abstract: A micro device transfer apparatus and a micro device transfer method are provided. The micro device transfer apparatus comprises a stage unit including a stage where a target substrate is to be disposed, a plurality of transfer head units disposed above the stage, and a transfer head unit moving part configured to move the plurality of transfer head units, wherein, the transfer head unit comprises a carrier substrate fastening part configured to fasten a carrier substrate where a plurality of micro devices are disposed, a mask unit disposed above the carrier substrate fastening part, the mask unit comprising a mask including an opening part and a shielding part, a light emitting part disposed on the mask unit, and a housing formed around the carrier substrate fastening part, the mask unit, and the light emitting part.

公开(公告)号：US20220384219A1

公开(公告)日：2022-12-01

申请号：US17588535

申请日：2022-01-31

Applicant: Samsung Display Co., LTD.

Inventor： Heung Yeol NA ,  Tae Hun KIM ,  Jung Woo CHOI

IPC: H01L21/67 ,  B23K26/00 ,  B65H23/00 ,  B65H75/44 ,  B23K26/12 ,  B23K26/16

Abstract: A laser machining apparatus includes, a processing chamber, a window disposed in a surface of the processing chamber, a substrate carrier disposed inside the processing chamber and facing the window, a laser irradiator which irradiates a laser onto the substrate carrier through the window, a protector supplier disposed on a side of the processing chamber, a protector retriever disposed on an opposite side of the processing chamber opposite to the side of the processing chamber, and a protector which connects the protector supplier with the protector retriever, where at least a portion of the protector is disposed between the substrate carrier and the window in the processing chamber.

公开(公告)号：US20170252774A1

公开(公告)日：2017-09-07

申请号：US15265868

申请日：2016-09-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Heung Yeol NA ,  Dong Wook KIM ,  Jae Wan SEOL ,  Seong Ho JEONG

IPC: B05D1/00

CPC classification number: C23C14/12 ,  C23C14/243 ,  G06F3/00 ,  H01L51/001

Abstract: A method of manufacturing a display device is provided. A method of manufacturing a display device comprises preparing a thin film forming apparatus including a crucible, which stores a source material for forming a thin film, and a front heatsink, which is disposed on the crucible and includes a reflective plate, wherein the reflective plate has a first surface with a first reflectivity and a second surface with a second reflectivity, which is different from the first reflectivity; andforming a thin film on a substrate by evaporating the source material of the thin film forming apparatus.