Invention Publication
- Patent Title: TRANSPORT VEHICLE CLEANING DEVICE AND ARTICLE TRANSPORT EQUIPMENT INCLUDING THE SAME
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Application No.: US17990726Application Date: 2022-11-20
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Publication No.: US20230178402A1Publication Date: 2023-06-08
- Inventor: Sung Ho LEE , Ok Kyung KANG , No Jae PARK
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR 20210170955 2021.12.02
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B08B5/02 ; H01L21/67

Abstract:
A transport vehicle cleaning device that cleans a transport vehicle incudes a housing including a cleaning space accommodating the transport vehicle for cleaning, a plurality of fans disposed at an upper part of the housing and generating a downward airflow in the cleaning space, a cleaning gas injector disposed at a ceiling of the housing and injecting a cleaning gas towards the transport vehicle in the cleaning space of the housing, an exhaust unit provided at a lower part of the housing and exhausting the cleaning gas supplied to the cleaning space and a foreign matter removed from the transport vehicle from the cleaning space, and a frame cover disposed in the housing and configured to completely cover opposite openings of the frame in the housing to form a closed internal space of the frame separated from the cleaning space.
Information query
IPC分类: