公开(公告)号：US20230207361A1

公开(公告)日：2023-06-29

申请号：US18083179

申请日：2022-12-16

Applicant: SEMES CO., LTD.

Inventor： Sung Ho LEE ,  No Jae PARK

IPC: H01L21/673 ,  H01L21/677

CPC classification number: H01L21/67393 ,  H01L21/67775 ,  H01L21/67769

Abstract: Provided are a flow supply apparatus and supply method. The flow supply apparatus, comprising: a rail; a transport unit disposed on the rail, where an object is loaded; and a gas treatment unit provided on the transport unit and configured to purge the object. The object includes a FOUP with a substrate accommodated therein, and fume is removed from the substrate through the purging.

公开(公告)号：US20230211961A1

公开(公告)日：2023-07-06

申请号：US18148021

申请日：2022-12-29

Applicant: SEMES CO., LTD.

Inventor： No Jae PARK

IPC: B65G47/86 ,  B65G47/08 ,  B65G47/26

CPC classification number: B65G47/842 ,  B65G47/082 ,  B65G47/261 ,  B65G2201/0297

Abstract: Disclosed is an article transferring apparatus, including: a travel rail provided along a ceiling of a manufacturing line in which processing devices are continuously disposed; and a transferring unit device traveling on the travel rail and sending and receiving an article to and from a mounting place of the processing device, in which the transferring unit includes: a vehicle traveling along the travel rail; a vehicle main body connected to the vehicle and providing loading parts on which articles are loaded; a hoist module installed in the vehicle main body and capable of exchanging the article with the mounting place and each of the loading parts; and a horizontal moving member for horizontally moving the hoist module in the vehicle main body so that the hoist module is located on any one of the loading parts, and the loading parts have a straight arrangement in which articles are loaded in a line along a traveling direction of the vehicle or a rhombic arrangement in which articles are loaded in all directions around a central opening through which articles enter and exist.

公开(公告)号：US20220063907A1

公开(公告)日：2022-03-03

申请号：US17465282

申请日：2021-09-02

Applicant: SEMES CO., LTD.

Inventor： Jun Chul PARK ,  No Jae PARK ,  Seul LEE ,  Hyi Jae KANG

IPC: B65G1/04 ,  B25J9/16 ,  B25J13/08 ,  B65G1/06 ,  G06T7/73

Abstract: The present disclosure provides an article storage apparatus and a method of controlling the same, which are capable of compensating for a position of a shelf part. The present disclosure may provide an article storage apparatus and a method of controlling the same, which include a method of performing teaching on a shelf in a rotation direction and then performing teaching on a transport robot at the time of performing the teaching on the shelf of the article storage apparatus, thereby implementing high precision and a low teaching failure rate.

公开(公告)号：US20230406631A1

公开(公告)日：2023-12-21

申请号：US18211098

申请日：2023-06-16

Applicant: SEMES CO., LTD.

Inventor： No Jae PARK

IPC: B65G1/137 ,  B65G1/04 ,  B65G43/08

CPC classification number: B65G1/137 ,  B65G1/0492 ,  B65G2203/046 ,  B65G2203/0233 ,  B65G2203/041 ,  B65G43/08

Abstract: Provided is an article transfer apparatus and article transfer method capable of autonomously loading or unloading an article by accurately checking a correct position in an article storage without a teaching process, the article transfer apparatus including a carriage body travelling along travel rails to transfer an article, and a position detection device mounted in the carriage body to detect position information related to a correct position from a detection target mounted in an article storage capable of storing the article in order to place the article at the correct position in the article storage where the article is to be stored.

公开(公告)号：US20230178402A1

公开(公告)日：2023-06-08

申请号：US17990726

申请日：2022-11-20

Applicant: SEMES CO., LTD.

Inventor： Sung Ho LEE ,  Ok Kyung KANG ,  No Jae PARK

IPC: H01L21/677 ,  B08B5/02 ,  H01L21/67

CPC classification number: H01L21/67733 ,  B08B5/023 ,  H01L21/67051

Abstract: A transport vehicle cleaning device that cleans a transport vehicle incudes a housing including a cleaning space accommodating the transport vehicle for cleaning, a plurality of fans disposed at an upper part of the housing and generating a downward airflow in the cleaning space, a cleaning gas injector disposed at a ceiling of the housing and injecting a cleaning gas towards the transport vehicle in the cleaning space of the housing, an exhaust unit provided at a lower part of the housing and exhausting the cleaning gas supplied to the cleaning space and a foreign matter removed from the transport vehicle from the cleaning space, and a frame cover disposed in the housing and configured to completely cover opposite openings of the frame in the housing to form a closed internal space of the frame separated from the cleaning space.