Invention Publication
- Patent Title: SYSTEMS AND METHODS OF MODULATING FLOW DURING VAPOR JET DEPOSITION OF ORGANIC MATERIALS
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Application No.: US18081766Application Date: 2022-12-15
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Publication No.: US20230183852A1Publication Date: 2023-06-15
- Inventor: Gregory McGRAW , William E. QUINN , Matthew KING , Elliot H. HARTFORD, JR. , Siddharth HARIKRISHNA MOHAN , Benjamin SWEDLOVE , Gregg KOTTAS
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- The original application number of the division: US14730768 2015.06.04
- Main IPC: C23C14/12
- IPC: C23C14/12 ; C23C14/54 ; C23C14/22 ; B41J2/045 ; C23C14/04

Abstract:
Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.
Information query
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