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公开(公告)号：US20210054495A1
公开(公告)日：2021-02-25
申请号：US17082169
申请日：2020-10-28
Applicant: Universal Display Corporation
Inventor： Gregory McGRAW , William E. QUINN , Matthew KING , Elliot H. HARTFORD, JR. , Siddharth HARIKRISHNA MOHAN , Benjamin SWEDLOVE , Gregg KOTTAS
Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.
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Patent Agency Ranking
2.发明申请SYSTEMS AND METHODS OF MODULATING FLOW DURING VAPOR JET DEPOSITION OF ORGANIC MATERIALS 审中-公开有机材料蒸汽喷射沉积过程中的流动调节系统及方法公开(公告)号：US20150380648A1
公开(公告)日：2015-12-31
申请号：US14730768
申请日：2015-06-04
Applicant: Universal Display Corporation
Inventor： Gregory McGRAW , William E. QUINN , Matthew KING , Elliot H. HARTFORD, JR. , Siddharth Harikrishna MOHAN , Benjamin SWEDLOVE , Gregg KOTTAS
CPC classification number: C23C14/12 , B05D1/60 , B41J2/045 , B41J2202/02 , C23C14/04 , C23C14/228 , C23C14/54 , H01L51/0005 , H01L51/56
Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.
Abstract translation: 所公开的主题的实施例提供了方法和系统，包括喷嘴，要沉积在与喷嘴流体连通的基板上的材料源，与待喷射的材料沉积的材料源流体连通的输送气体源， 与喷嘴相邻设置的排气通道，与喷嘴和排气通道流体连通并且邻近排气通道设置的限制气体源，以及致动器，用于调节喷嘴的沉积喷嘴孔和 沉积目标。 飞高高度分离的调整可能会停止和/或开始从喷嘴沉积材料。
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3.发明申请公开(公告)号：US20170104159A1
公开(公告)日：2017-04-13
申请号：US15291756
申请日：2016-10-12
Applicant: Universal Display Corporation
Inventor： Matthew KING , William E. QUINN , Gregory MCGRAW , Siddharth HARIKRISHNA MOHAN , Elliot H. HARTFORD, Jr. , Benjamin SWEDLOVE , Gregg KOTTAS , Tomasz TROJACKI , Julia J. BROWN
CPC classification number: H01L51/0013 , C23C14/12 , C23C14/228 , C23C14/243 , H01L51/008 , H01L51/5012 , H01L51/5056 , H01L51/5072 , H01L51/5088 , H01L51/5092 , H01L51/5096 , H01L51/5206 , H01L51/5221 , H01L51/5253 , H01L51/56 , H01L2251/5353
Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.
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4.发明公开公开(公告)号：US20230183852A1
公开(公告)日：2023-06-15
申请号：US18081766
申请日：2022-12-15
Applicant: Universal Display Corporation
Inventor： Gregory McGRAW , William E. QUINN , Matthew KING , Elliot H. HARTFORD, JR. , Siddharth HARIKRISHNA MOHAN , Benjamin SWEDLOVE , Gregg KOTTAS
CPC classification number: C23C14/12 , B41J2/045 , C23C14/04 , C23C14/54 , C23C14/228 , B05D1/60 , B41J2202/02
Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.
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公开(公告)号：US20230189626A1
公开(公告)日：2023-06-15
申请号：US18101416
申请日：2023-01-25
Applicant: Universal Display Corporation
Inventor： Gregory MCGRAW , William E. QUINN , Gregg KOTTAS , Matthew KING , Benjamin SWEDLOVE , Tomasz TROJACKI
IPC: H10K71/00 , C23C16/455 , C23C16/44 , H10K71/13
CPC classification number: H10K71/00 , C23C16/4412 , C23C16/4551 , C23C16/45563 , H10K71/13
Abstract: Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.
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6.发明申请公开(公告)号：US20190221783A1
公开(公告)日：2019-07-18
申请号：US16245554
申请日：2019-01-11
Applicant: Universal Display Corporation
Inventor： Gregory MCGRAW , William E. QUINN , Gregg KOTTAS , Matthew KING , Benjamin SWEDLOVE , Tomasz TROJACKI
CPC classification number: H01L51/56 , B41J2/14 , H01L51/0005
Abstract: Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.
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