Invention Publication
- Patent Title: FERROELECTRIC OXIDE- AND FERROELECTRIC MONOCHALCOGENIDE-BASED CAPACITORS
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Application No.: US17555207Application Date: 2021-12-17
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Publication No.: US20230200079A1Publication Date: 2023-06-22
- Inventor: Chia-Ching Lin , Tanay A. Gosavi , Uygar E. Avci , Sou-Chi Chang , Hai Li , Dmitri Evgenievich Nikonov , Kaan Oguz , Ashish Verma Penumatcha , John J. Plombon , Ian Alexander Young
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L27/11514
- IPC: H01L27/11514 ; H01L49/02 ; H01L29/51

Abstract:
A first type of ferroelectric capacitor comprises electrodes and an insulating layer comprising ferroelectric oxides. In some embodiments, the electrodes and the insulating layer comprise perovskite ferroelectric oxides. A second type of ferroelectric capacitor comprises a ferroelectric insulating layer comprising certain monochalcogenides. Both types of ferroelectric capacitors can have a coercive voltage that is less than one volt. Such capacitors are attractive for use in low-voltage non-volatile embedded memories for next-generation semiconductor manufacturing technologies.
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