- 专利标题: APPARATUS FOR CORRECTING PHOTOMASK AND METHOD THEREOF
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申请号: US17899616申请日: 2022-08-31
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公开(公告)号: US20230229074A1公开(公告)日: 2023-07-20
- 发明人: Hyo Won YANG , Hyun Yoon , Ji Hoon Jeong , In Ki Jung , Ki Hoon Choi , Tae Hee Kim , Se Hoon Oh
- 申请人: SEMES CO., LTD.
- 申请人地址: KR Chungcheongnam-do
- 专利权人: SEMES CO., LTD.
- 当前专利权人: SEMES CO., LTD.
- 当前专利权人地址: KR Chungcheongnam-do
- 优先权: KR 20210191908 2021.12.30
- 主分类号: G03F1/72
- IPC分类号: G03F1/72
摘要:
A photomask correction method capable of increasing the photomask precision is provided. The photomask correction method comprises measuring an intensity profile of a laser, acquiring etching amount data corresponding to the measured intensity profile using a library, determining a process parameter of the laser based on the etching amount data, and correcting a photomask with the laser according to the determined process parameter.
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