- 专利标题： METAL RIBS IN ELECTROMECHANICAL DEVICES
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申请号： US18454034申请日： 2023-08-22
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公开(公告)号： US20230396230A1公开(公告)日： 2023-12-07
- 发明人: Anindya PODDAR , Hau NGUYEN , Masamitsu MATSUURA
- 申请人： TEXAS INSTRUMENTS INCORPORATED
- 申请人地址： US TX Dallas
- 专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人： TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址： US TX Dallas
- 主分类号： H03H9/02
- IPC分类号： H03H9/02 ; H03H9/05 ; H03H9/10 ; H03H9/17 ; H03H9/24 ; H03H3/007 ; H03H3/04
摘要：
In examples, a device comprises a semiconductor die, a thin-film layer, and an air cavity positioned between the semiconductor die and the thin-film layer. The air cavity comprises a resonator positioned on the semiconductor die. A rib couples to a surface of the thin-film layer opposite the air cavity.
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