Invention Publication
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE CONTAINING TEMPLATED CRYSTALLINE FERROELECTRIC MEMORY ELEMENTS AND METHOD OF MAKING THEREOF
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Application No.: US17809758Application Date: 2022-06-29
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Publication No.: US20240008281A1Publication Date: 2024-01-04
- Inventor: Kartik SONDHI , Adarsh RAJASHEKHAR , Fei ZHOU , Raghuveer S. MAKALA
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX ADDISON
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX ADDISON
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/1159

Abstract:
A ferroelectric memory device includes an alternating stack of insulating layers and electrically conductive layers, a memory opening extending vertically through the alternating stack and including laterally-protruding portions at levels of the electrically conductive layers, and a memory opening fill structure located in the memory opening and containing a vertical semiconductor channel and a vertical stack of discrete ferroelectric memory structures located in the laterally-protruding portions of the memory opening. Each of the ferroelectric memory structures includes crystalline ferroelectric material portion and a crystalline template material portion located between a respective electrically conductive layer of the electrically conductive layers and the crystalline ferroelectric material portion.
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