Invention Publication
- Patent Title: CASSETTE HOUSING, PROBER, SERVER RACK, AND STORAGE SYSTEM
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Application No.: US18371536Application Date: 2023-09-22
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Publication No.: US20240014061A1Publication Date: 2024-01-11
- Inventor: Tatsuro HITOMI , Yasuhito YOSHIMIZU , Arata INOUE , Hiroyuki DOHMAE , Kazuhito HAYASAKA , Tomoya SANUKI
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; G01R1/073 ; G01R1/067 ; H01L21/66

Abstract:
According to one embodiment, a cassette housing includes a storage unit, a probe card, and a container. The storage unit stores a semiconductor wafer including a plurality of nonvolatile memory chips. The probe card includes a probe. The probe is configured to be brought into contact with a pad electrode provided on the semiconductor wafer. The container contains heat transfer fluid for lowering or raising temperature of one or both of the probe card and the semiconductor wafer stored in the storage unit.
Information query
IPC分类: