Invention Publication
- Patent Title: DRYING APPARATUS AND SUBSTRATE TREATING APPARATUS
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Application No.: US18120981Application Date: 2023-03-13
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Publication No.: US20240093940A1Publication Date: 2024-03-21
- Inventor: HAE-WON CHOI , JAE SEONG LEE , HONG CHAN CHO
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR 20220116364 2022.09.15
- Main IPC: F26B25/06
- IPC: F26B25/06 ; F26B5/00

Abstract:
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a first chamber having a supply port for supplying a treating fluid; a second chamber in combination with the first chamber defining a treating space; a support member configured to support a substrate in the treating space; and a baffle unit installed in the first chamber to face the support port, and wherein the baffle unit includes: a first baffle assembly including a first baffle having first holes through which the treating fluid flow; and a second baffle assembly installed at a position farther from the support port than the first baffle assembly, and including a second baffle having second holes through which the treating fluid flow.
Information query
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