Invention Publication
- Patent Title: THIN FILM CAPACITORS
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Application No.: US17948586Application Date: 2022-09-20
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Publication No.: US20240096561A1Publication Date: 2024-03-21
- Inventor: Mahdi Mohammadighaleni , Benjamin Duong , Shayan Kaviani , Joshua Stacey , Miranda Ngan , Dilan Seneviratne , Thomas Heaton , Srinivas Venkata Ramanuja Pietambaram , Whitney Bryks , Jieying Kong
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01G4/33
- IPC: H01G4/33 ; H01G4/012

Abstract:
An apparatus, system, and method for in-situ three-dimensional (3D) thin-film capacitor (TFC) are provided. A 3D TFC can include a glass core, a through glass via (TGV) in the glass core including first conductive material, the first conductive material forming a first electrode of the 3D MIM capacitor, a second conductive material acting as a second electrode of the 3D MIM capacitor, and a dielectric material in contact with the first and second conductive materials, the dielectric material extending vertically and horizontally and physically separating the first and second conductive materials.
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