ELECTRONIC SUBSTRATES HAVING EMBEDDED INDUCTORS

    公开(公告)号:US20220093535A1

    公开(公告)日:2022-03-24

    申请号:US17029866

    申请日:2020-09-23

    申请人: Intel Corporation

    摘要: An electronic substrate may be fabricated by forming a base substrate and forming an inductor extending through the base substrate, wherein the inductor includes a magnetic material layer and a barrier layer, such that the barrier layer prevents the magnetic material layer from leaching into plating solutions during the fabrication of the electronic substrate. In one embodiment, the barrier material may comprise titanium. In another embodiment, the barrier layer may comprise a polymeric material. In still another embodiment, the barrier layer may comprise a nitride material layer. The inductor may further include a plating seed layer on the barrier layer and a conductive fill material abutting the plating seed layer.