Invention Publication
- Patent Title: METHOD AND SYSTEMS USEFUL FOR PRODUCING ALUMINUM IONS
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Application No.: US18536031Application Date: 2023-12-11
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Publication No.: US20240136145A1Publication Date: 2024-04-25
- Inventor: Ying Tang , Joe R. Despres , Joseph D. Sweeney , Oleg Byl , Barry Lewis Chambers
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/32
Abstract:
Described are ion implantation devices, systems, and methods, and in particular to an ion source that is useful for generating an aluminum ion beam.
Information query
