Invention Publication
- Patent Title: CHANNEL DEPOPULATION FOR FORKSHEET TRANSISTORS
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Application No.: US18375858Application Date: 2023-10-02
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Publication No.: US20240164080A1Publication Date: 2024-05-16
- Inventor: Peng ZHENG , Varun MISHRA , Harold W. KENNEL , Eric A. KARL , Tahir GHANI
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H10B10/00
- IPC: H10B10/00 ; H01L29/06 ; H01L29/10

Abstract:
Embodiments disclosed herein include forksheet transistor devices with depopulated channels. In an example, an integrated circuit structure includes a backbone. A first transistor device includes a first vertical stack of semiconductor channels adjacent to a first edge of the backbone. The first vertical stack of semiconductor channels includes first semiconductor channels and a second semiconductor channel over or beneath the first semiconductor channels. A concentration of a dopant in the first semiconductor channels is less than a concentration of the dopant in the second semiconductor channel. A second transistor device includes a second vertical stack of semiconductor channels adjacent to a second edge of the backbone opposite the first edge.
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