- 专利标题: ACTIVE THERMAL INTERPOSER DEVICE WITH THERMAL ISOLATION STRUCTURES
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申请号: US18440226申请日: 2024-02-13
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公开(公告)号: US20240183898A1公开(公告)日: 2024-06-06
- 发明人: Karthik Ranganathan , Aritomo Kikuchi , Merlin Wallner , Rajan Surve , Samer Kabbani , Paul Ferrari , Ikeda Hiroki , Kiyokawa Toshiyuki , Gregory Cruzan , Todd Berk , Ian Williams , Mohammad Ghazvini , Thomas Jones
- 申请人: Advantest Test Solutions, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Advantest Test Solutions, Inc.
- 当前专利权人: Advantest Test Solutions, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R1/04
摘要:
An active thermal interposer (ATI) device for use in testing integrated circuit device under test (DUT) having thermal isolation structures. The ATI device includes a formation having a first surface and a second surface, wherein the first surface is operable to be disposed adjacent to a cold plate, and a plurality of heating zones defined across a second surface of the formation, the plurality of heating zones operable to be controlled by a thermal controller to selectively heat and maintain respective temperatures thereof, the plurality of heating zones operable to heat a plurality of areas of the DUT when the second surface of the formation is disposed adjacent to an interface surface of the DUT during testing of the DUT. The ATI device includes a plurality of thermal resistance structures configured to resist thermal conductance between the plurality of heating zones.
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