Invention Application
- Patent Title: METAL RIBS IN ELECTROMECHANICAL DEVICES
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Application No.: US18966299Application Date: 2024-12-03
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Publication No.: US20250096768A1Publication Date: 2025-03-20
- Inventor: Anindya PODDAR , Hau NGUYEN , Masamitsu MATSUURA
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/007 ; H03H3/04 ; H03H9/05 ; H03H9/10 ; H03H9/17 ; H03H9/24
Abstract:
In examples, a device comprises a semiconductor die, a thin-film layer, and an air cavity positioned between the semiconductor die and the thin-film layer. The air cavity comprises a resonator positioned on the semiconductor die. A rib couples to a surface of the thin-film layer opposite the air cavity.
Information query
