发明授权
- 专利标题: Semiconductor transducer
- 专利标题(中): 半导体传感器
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申请号: US940077申请日: 1978-09-06
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公开(公告)号: US4166384A公开(公告)日: 1979-09-04
- 发明人: Yasumasa Matsuda , Kazuji Yamada , Satoshi Shimada , Motohisa Nishihara , Tomio Yasuda , Masatoshi Tsuchiya , Ko Soeno , Mitsuo Ai , Takeo Nagata , Yoshitaka Matsuoka
- 申请人: Yasumasa Matsuda , Kazuji Yamada , Satoshi Shimada , Motohisa Nishihara , Tomio Yasuda , Masatoshi Tsuchiya , Ko Soeno , Mitsuo Ai , Takeo Nagata , Yoshitaka Matsuoka
- 申请人地址: JPX
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX52-107439 19770907
- 主分类号: G01L1/26
- IPC分类号: G01L1/26 ; C21D8/00 ; C22C38/00 ; C22C38/10 ; G01D5/16 ; G01L1/22 ; G01L9/00 ; G01L1/04 ; G01L1/18
摘要:
A semiconductor transducer comprising an improved strain-yielding body yielding a strain in response to the impartation of a force or displacement, and a semiconductor strain gauge bonded to the strain-yielding body. The improved strain-yielding body is made of an iron-nickel-cobalt alloy containing 28.2 to 31.0% by weight of nickel and 15.0 to 19.5% by weight of cobalt. This iron-nickel-cobalt alloy is initially heated up to a temperature above 600.degree. C. for the purpose of standard heat treatment for removing its internal strain. After the standard heat treatment, the iron-nickel-cobalt alloy is subjected to cold working at a working rate of more than and including 60%, and is then subjected to heat treatment at a temperature between 350.degree. C. and 600.degree. C. The heat-treated iron-nickel-cobalt alloy is shaped into the predetermined form of the strain-yielding body.
公开/授权文献
- US6133563A Sensor cell having a soft saturation circuit 公开/授权日:2000-10-17
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