发明授权
- 专利标题: Method for producing a beryllium oxide film
- 专利标题(中): 氧化铍膜的制造方法
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申请号: US403151申请日: 1982-07-29
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公开(公告)号: US4451499A公开(公告)日: 1984-05-29
- 发明人: Kiyoshi Morimoto , Toshinori Takagi , Hiroshi Watanabe
- 申请人: Kiyoshi Morimoto , Toshinori Takagi , Hiroshi Watanabe
- 申请人地址: JPX Mobara
- 专利权人: Futaba Denshi Kogyo Kabushiki Kaisha
- 当前专利权人: Futaba Denshi Kogyo Kabushiki Kaisha
- 当前专利权人地址: JPX Mobara
- 优先权: JPX54-93166 19790724
- 主分类号: C23C14/06
- IPC分类号: C23C14/06 ; B01J19/08 ; C01F3/02 ; C04B35/08 ; C23C14/00 ; C23C14/08 ; C23C14/32 ; C23C14/56 ; C30B25/02 ; C30B25/06 ; C30B28/12 ; C30B28/14 ; C30B29/16 ; B05D5/12
摘要:
A beryllium oxide (BeO) film is disclosed, which is produced by impinging partially ionized vapor of metal beryllium and oxygen upon a substrate.
公开/授权文献
- USD321105S Display fixture 公开/授权日:1991-10-29