A semiconductor capacitor for use in an analog-to-digital converter includes two parallel connected capacitors with separate lower plates (44) and (46) fabricated of polycrystalline silicon and upper plates (52) and (54) also fabricated of polysilicon. The plates are separated by capacitive oxide dielectric structures (48) and (50). They are interconnected such that the lower plate (44) of one capacitor is connected to the upper plate (54) of the other capacitor and the lower plate (46) of the other capacitor is connected to the upper plate (52) of the first capacitor. With such a configuration, the odd ordered non-linearities contributing to the voltage coefficient errors are cancelled.