Carbides, nitrides or carbonitrides of elements from the main groups III and IV and sub-groups III, IV, V and VI of the periodic system of elements are prepared by(i) reacting compounds of the formula MX.sub.m or R.sub.n MX.sub.m-n with a reactive hydrocarbon-containing compound or a mixture of compounds which is polymerizable and which contains a reactive compound with one C--OH-group in whichM is an element of the main group III or IV or sub-group of III, IV, V or VI of the periodic system of elements,X is a halogen,R is hydrogen or alkyl or aryl,m is an integer corresponding to the valency stage of M,n is an integer from 1 to one less than the velency stage of M, and(ii) thermally decomposing the resulting product from (i) to the corresponding carbide or to the corresponding nitrides or carbonitrides with further nitridation.