发明授权
- 专利标题: Manufacturing method and equipment of single silicon crystal
- 专利标题(中): 单晶晶体的制造方法和设备
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申请号: US460581申请日: 1990-01-03
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公开(公告)号: US5087321A公开(公告)日: 1992-02-11
- 发明人: Hiroshi Kamio , Kenji Araki , Yoshinobu Shima , Makoto Suzuki , Akira Kazama , Shigetake Horie
- 申请人: Hiroshi Kamio , Kenji Araki , Yoshinobu Shima , Makoto Suzuki , Akira Kazama , Shigetake Horie
- 申请人地址: JPX Tokyo
- 专利权人: NKK Corporation
- 当前专利权人: NKK Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX62-308766 19871208
- 主分类号: H01L21/18
- IPC分类号: H01L21/18 ; C30B15/02 ; C30B15/12 ; C30B15/14 ; H01L21/208
摘要:
Method for manufacturing a large columner silicon single crystal having a diameter of 12 cm-30 cm by pulling up a crystal, growing, and rotating it in one direction, from molten silicon material in a quartz crucible rotating in the other direction. The inside of the quartz crucible is divided into two sections--the peripheral section for feeding and melting raw materials and the central section for growing and pulling the crystal--by means of a cylindrical partition. The material feeding and melting section and the partition are sufficiently covered by an insulating board to reduce radiant energy heat loss and to keep the temperature at least above the freezing point of the molten materials in order to prevent the molten materials from solidifying at or around the inner wall of the cylindrical partition.
公开/授权文献
- US5631292A Eatable taste modifiers 公开/授权日:1997-05-20