公开(公告)号：US07599052B2

公开(公告)日：2009-10-06

申请号：US12228478

申请日：2008-08-13

申请人： Mitsuaki Uesugi ,  Shoji Yoshikawa ,  Masaichi Inomata ,  Tsutomu Kawamura ,  Takahiko Oshige ,  Hiroyuki Sugiura ,  Akira Kazama ,  Tsuneo Suyama ,  Yasuo Kushida ,  Shuichi Harada ,  Hajime Tanaka ,  Osamu Uehara ,  Shuji Kaneto ,  Masahiro Iwabuchi ,  Kozo Harada ,  Shinichi Tomonaga ,  Shigemi Fukuda

发明人： Mitsuaki Uesugi ,  Shoji Yoshikawa ,  Masaichi Inomata ,  Tsutomu Kawamura ,  Takahiko Oshige ,  Hiroyuki Sugiura ,  Akira Kazama ,  Tsuneo Suyama ,  Yasuo Kushida ,  Shuichi Harada ,  Hajime Tanaka ,  Osamu Uehara ,  Shuji Kaneto ,  Masahiro Iwabuchi ,  Kozo Harada ,  Shinichi Tomonaga ,  Shigemi Fukuda

IPC分类号： G01N21/00 ,  A47L1/08

CPC分类号： B21C51/005 ,  G01N21/89

摘要： A defect marking device includes a flaw inspection device which has a plurality of light-receiving parts that identify reflected lights coming from an inspection plane of a metal strip under two or more of optical conditions different from each other; a signal processing section that judges the presence/absence of surface flaw on the inspection plane based on a combination of reflected light components identified under these optical conditions different from each other; and a marking device which applies marking that indicates information relating to the flaw on the surface of the metal strip.

公开(公告)号：US07248366B2

公开(公告)日：2007-07-24

申请号：US09956737

申请日：2001-09-17

申请人： Mitsuaki Uesugi ,  Shoji Yoshikawa ,  Masaichi Inomata ,  Tsutomu Kawamura ,  Takahiko Oshige ,  Hiroyuki Sugiura ,  Akira Kazama ,  Tsuneo Suyama ,  Yasuo Kushida ,  Shuichi Harada ,  Hajime Tanaka ,  Osamu Uehara ,  Shuji Kaneto ,  Masahiro Iwabuchi ,  Kozo Harada ,  Shinichi Tomonaga ,  Shigemi Fukuda

发明人： Mitsuaki Uesugi ,  Shoji Yoshikawa ,  Masaichi Inomata ,  Tsutomu Kawamura ,  Takahiko Oshige ,  Hiroyuki Sugiura ,  Akira Kazama ,  Tsuneo Suyama ,  Yasuo Kushida ,  Shuichi Harada ,  Hajime Tanaka ,  Osamu Uehara ,  Shuji Kaneto ,  Masahiro Iwabuchi ,  Kozo Harada ,  Shinichi Tomonaga ,  Shigemi Fukuda

IPC分类号： G01N21/00 ,  G01N21/84

CPC分类号： B21C51/005 ,  G01N21/89

摘要： The defect marking method comprises the steps of: installing a surface defect tester to detect surface flaw and a marker device to apply marking at defect position, in a continuous processing line of steel sheet; detecting the surface flaw on the steel sheet using the surface defect tester; determining defect name, defect grade, defect length, and defect position in the width direction of the steel sheet, on the basis of thus detected flaw information, further identifying the defect in terms of harmful defect, injudgicable defect, and harmless defect; applying tracking of the defect position for each of the harmful defect and the injudgicable defect; and applying marking to the defect position. The defect marking device comprises a defect inspection means having plurality of light-receiving parts and a signal processing section, and a marking means.

摘要翻译： 缺陷标记方法包括以下步骤：在钢板的连续加工线中安装表面缺陷测试仪以检测表面缺陷和标记装置在缺陷位置施加标记; 使用表面缺陷测试仪检测钢板表面缺陷; 根据这样检测到的缺陷信息确定钢板宽度方向的缺陷名，缺陷等级，缺陷长度和缺陷位置，进一步确定有害缺陷，注意缺陷和无害缺陷方面的缺陷; 对每个有害缺陷和不合理缺陷的缺陷位置进行跟踪; 并将标记应用于缺陷位置。 缺陷标记装置包括具有多个光接收部分和信号处理部分的缺陷检查装置和标记装置。

公开(公告)号：US5311285A

公开(公告)日：1994-05-10

申请号：US816594

申请日：1991-12-31

申请人： Takahiko Oshige ,  Takeo Yamada ,  Akira Kazama

发明人： Takahiko Oshige ,  Takeo Yamada ,  Akira Kazama

IPC分类号： G01B11/06 ,  G01J4/04 ,  G01N21/21

CPC分类号： G01J4/04 ,  G01B11/065 ,  G01N21/211

摘要： Movable optical parts included in an ellipsometer are removed to increase the measurement speed, and a specific quadrant to which a phase difference .DELTA. as an ellipsometric parameter belongs is determined by one measuring operation. A beam is radiated from a light source section onto a measurement target, and the reflected beam having an elliptically polarized beam, which is reflected by the target, is divided into four different polarized light components. The optical intensities of the respective light components are then detected. Ellipsometric parameters .psi. and .DELTA. are calculated on the basis of the detected four optical intensities. In addition, the above-mentioned four different polarized light components are obtained by using a wave plate. Furthermore, the polarization directions of the four polarized light components whose optical intensities are obtained are respectively set at angles -45.degree., +45.degree., 90.degree., and 0.degree. with respect to a reference direction. Alternatively, a composite beam splitter is used to obtain four polarized light components.

摘要翻译： 除去包括在椭偏仪中的可移动光学部件以增加测量速度，并且通过一次测量操作来确定作为椭偏参数所属的相位差DELTA的特定象限。 将光束从光源部分辐射到测量对象上，并且由目标反射的具有椭圆偏振光束的反射光束被分成四个不同的偏振光分量。 然后检测各个光分量的光强度。 基于检测到的四个光学强度计算椭圆偏振参数psi和DELTA。 此外，通过使用波片获得上述四种不同的偏振光分量。 此外，获得光强度的四个偏振光分量的偏振方向分别相对于参考方向设置在-45°，+ 45°，90°和0°的角度。 或者，使用复合分束器来获得四个偏振光分量。

公开(公告)号：US5126114A

公开(公告)日：1992-06-30

申请号：US460563

申请日：1990-01-03

申请人： Hiroshi Kamio ,  Kenji Araki ,  Yoshinobu Shima ,  Makoto Suzuki ,  Akira Kazama ,  Shigetake Horie ,  Yasumitsu Nakahama

发明人： Hiroshi Kamio ,  Kenji Araki ,  Yoshinobu Shima ,  Makoto Suzuki ,  Akira Kazama ,  Shigetake Horie ,  Yasumitsu Nakahama

IPC分类号： H01L21/18 ,  C30B15/02 ,  C30B15/12 ,  C30B15/14 ,  H01L21/208

CPC分类号： C30B15/02 ,  C30B15/14 ,  Y10S117/90 ,  Y10T117/1052

摘要： According to the present invention, the inside of a crucible in which a molten raw material is placed is partitioned off with a partition ring so that a pulled single crystal is surrounded and the molten raw material may be moved and granular silicon is supplied to the outside of the partition ring, thereby to form the whole surface of outside molten liquid as a granular silicon soluble region so as to maintain the molten liquid surface on the inside of the partition ring at almost a constant level, and also to set the temperature of the molten liquid on the outside of the partition ring higher than the temperature of the inside thereof at least by 10.degree. C. or higher by covering the partition ring and the molten liquid surface on the outside thereof with a heat keeping board.

摘要翻译： 根据本发明，其中放置熔融原料的坩埚的内部用分隔环分隔开，使得拉出的单晶被包围，并且可以移动熔融的原料，并将颗粒状硅供应到外部 从而形成作为粒状硅溶解区域的外部熔融液体的整个表面，以将分隔环内部的熔融液面维持在几乎恒定的水平，并且还将 通过用隔热板覆盖分隔环和其外部的熔融液体表面，将分隔环外侧的熔融液体的内部的温度高于10℃以上。

公开(公告)号：US5087321A

公开(公告)日：1992-02-11

申请号：US460581

申请日：1990-01-03

申请人： Hiroshi Kamio ,  Kenji Araki ,  Yoshinobu Shima ,  Makoto Suzuki ,  Akira Kazama ,  Shigetake Horie

发明人： Hiroshi Kamio ,  Kenji Araki ,  Yoshinobu Shima ,  Makoto Suzuki ,  Akira Kazama ,  Shigetake Horie

IPC分类号： H01L21/18 ,  C30B15/02 ,  C30B15/12 ,  C30B15/14 ,  H01L21/208

CPC分类号： C30B15/02 ,  C30B15/14 ,  Y10S117/90 ,  Y10T117/1052

摘要： Method for manufacturing a large columner silicon single crystal having a diameter of 12 cm-30 cm by pulling up a crystal, growing, and rotating it in one direction, from molten silicon material in a quartz crucible rotating in the other direction. The inside of the quartz crucible is divided into two sections--the peripheral section for feeding and melting raw materials and the central section for growing and pulling the crystal--by means of a cylindrical partition. The material feeding and melting section and the partition are sufficiently covered by an insulating board to reduce radiant energy heat loss and to keep the temperature at least above the freezing point of the molten materials in order to prevent the molten materials from solidifying at or around the inner wall of the cylindrical partition.

公开(公告)号：US5835220A

公开(公告)日：1998-11-10

申请号：US549451

申请日：1995-10-27

申请人： Akira Kazama ,  Takahiko Oshige ,  Tsutomu Kawamura ,  Yuji Matoba

发明人： Akira Kazama ,  Takahiko Oshige ,  Tsutomu Kawamura ,  Yuji Matoba

IPC分类号： G01J4/04 ,  G01N21/21

CPC分类号： G01N21/211 ,  G01J4/04

摘要： A method for detecting a surface flaw which includes the steps of (i) irradiating polarized light to a surface of a sample to be inspected and determining ellipso-parameters (.PSI., .DELTA.) of reflected light from the surface of the sample; (ii) irradiating light to a same position as irradiated by the polarized light and determining the intensity (I) of reflected light from the surface of the sample; and (iii) determining a type and grade of a flaw on the surface of the sample based on the ellipso-parameters (.PSI.,.DELTA.) and the reflected light intensity (I). A surface flaw detecting apparatus includes (i) a first measuring device for irradiating polarized light to a surface to be inspected and measuring ellipso-parameters (.PSI.,.DELTA.) of reflected light from the surface; (ii) a second measuring device for irradiating light to a same position as irradiated by the polarized light and measuring the intensity (I) of reflected light from that position; and (iii) an output device for outputting a three-dimensional coordinate position of .PSI., .DELTA., I representing the reflected light from the surface, while sorting the position into a preset zone.

摘要翻译： 一种用于检测表面缺陷的方法，包括以下步骤：（i）将偏振光照射到待检测样品的表面，并确定来自样品表面的反射光的椭圆参数（PSI，DELTA）; （ii）将光照射到与偏振光照射的相同位置，并确定来自样品表面的反射光的强度（I）; 和（iii）基于椭圆参数（PSI，DELTA）和反射光强度（I）确定样品表面上的缺陷的类型和等级。 表面缺陷检测装置包括：（i）用于将偏振光照射到被检查表面的第一测量装置，并测量来自表面的反射光的椭圆参数（PSI，DELTA）; （ii）用于将光照射到与偏振光照射的相同位置并测量来自该位置的反射光的强度（I）的第二测量装置; 以及（iii）输出装置，用于在将位置分类到预设区域中时输出表示来自表面的反射光的PSI的三维坐标位置，DELTA，I。

公开(公告)号：US07423744B2

公开(公告)日：2008-09-09

申请号：US11586031

申请日：2006-10-24

申请人： Mitsuaki Uesugi ,  Shoji Yoshikawa ,  Masaichi Inomata ,  Tsutomu Kawamura ,  Takahiko Oshige ,  Hiroyuki Sugiura ,  Akira Kazama ,  Tsuneo Suyama ,  Yasuo Kushida ,  Shuichi Harada ,  Hajime Tanaka ,  Osamu Uehara ,  Shuji Kaneto ,  Masahiro Iwabuchi ,  Kozo Harada ,  Shinichi Tomonaga ,  Shigemi Fukuda

发明人： Mitsuaki Uesugi ,  Shoji Yoshikawa ,  Masaichi Inomata ,  Tsutomu Kawamura ,  Takahiko Oshige ,  Hiroyuki Sugiura ,  Akira Kazama ,  Tsuneo Suyama ,  Yasuo Kushida ,  Shuichi Harada ,  Hajime Tanaka ,  Osamu Uehara ,  Shuji Kaneto ,  Masahiro Iwabuchi ,  Kozo Harada ,  Shinichi Tomonaga ,  Shigemi Fukuda

IPC分类号： G01N21/84 ,  G01N21/00

CPC分类号： B21C51/005 ,  G01N21/89

摘要： A defect marking device includes a flaw inspection device which has a plurality of light-receiving parts that identify reflected lights coming from an inspection plane of a metal strip under two or more of optical conditions different from each other; a signal processing section that judges the presence/absence of surface flaw on the inspection plane based on a combination of reflected light components identified under these optical conditions different from each other; and a marking device which applies marking that indicates information relating to the flaw on the surface of the metal strip.

摘要翻译： 缺陷标记装置包括：瑕疵检查装置，其具有多个受光部，该多个受光部在两个以上的光学条件彼此不同的情况下识别来自金属条的检查平面的反射光; 信号处理部，其基于在这些彼此不同的光学条件下识别的反射光分量的组合来判断检查平面上的表面缺陷的存在/不存在; 以及标记装置，其在金属带的表面上施加指示与缺陷有关的信息的标记。

公开(公告)号：US20070052964A1

公开(公告)日：2007-03-08

申请号：US11586031

申请日：2006-10-24

申请人： Mitsuaki Uesugi ,  Shoji Yoshikawa ,  Masaichi Inomata ,  Tsutomu Kawamura ,  Takahiko Oshige ,  Hiroyuki Sugiura ,  Akira Kazama ,  Tsuneo Suyama ,  Yasuo Kushida ,  Shuichi Harada ,  Hajime Tanaka ,  Osamu Uehara ,  Shuji Kaneto ,  Masahiro Iwabuchi ,  Kozo Harada ,  Shinichi Tomonaga ,  Shigemi Fukuda

发明人： Mitsuaki Uesugi ,  Shoji Yoshikawa ,  Masaichi Inomata ,  Tsutomu Kawamura ,  Takahiko Oshige ,  Hiroyuki Sugiura ,  Akira Kazama ,  Tsuneo Suyama ,  Yasuo Kushida ,  Shuichi Harada ,  Hajime Tanaka ,  Osamu Uehara ,  Shuji Kaneto ,  Masahiro Iwabuchi ,  Kozo Harada ,  Shinichi Tomonaga ,  Shigemi Fukuda

IPC分类号： G01N21/84

CPC分类号： B21C51/005 ,  G01N21/89

摘要： A defect marking device includes a flaw inspection device which has a plurality of light-receiving parts that identify reflected lights coming from an inspection plane of a metal strip under two or more of optical conditions different from each other; a signal processing section that judges the presence/absence of surface flaw on the inspection plane based on a combination of reflected light components identified under these optical conditions different from each other; and a marking device which applies marking that indicates information relating to the flaw on the surface of the metal strip.

摘要翻译： 缺陷标记装置包括：瑕疵检查装置，其具有多个受光部，该多个受光部在两个以上的光学条件彼此不同的情况下识别来自金属条的检查平面的反射光; 信号处理部，其基于在这些彼此不同的光学条件下识别的反射光分量的组合来判断检查平面上的表面缺陷的存在/不存在; 以及标记装置，其在金属带的表面上施加指示与缺陷有关的信息的标记。

公开(公告)号：US5087429A

公开(公告)日：1992-02-11

申请号：US343833

申请日：1989-04-26

申请人： Hiroshi Kamio ,  Kenji Araki ,  Yoshinobu Shima ,  Makoto Suzuki ,  Akira Kazama ,  Shigetake Horie ,  Yasumitsu Nakahama

发明人： Hiroshi Kamio ,  Kenji Araki ,  Yoshinobu Shima ,  Makoto Suzuki ,  Akira Kazama ,  Shigetake Horie ,  Yasumitsu Nakahama

IPC分类号： C30B15/00 ,  C30B15/02 ,  C30B15/12 ,  C30B15/14

CPC分类号： C30B29/06 ,  C30B15/02 ,  C30B15/12 ,  C30B15/14 ,  Y10S117/912 ,  Y10T117/1052 ,  Y10T117/1056 ,  Y10T117/1068

摘要： The present invention relates to a method and apparatus for manufacturing silicon single crystals by the Czochralski method, including the steps of dividing a crucible containing molten silicon into an inner single crystal growing section and an outer material feeding section to allow said molten silicon to move slowly, and pulling a silicon single crystal from said single crystal growing section while continuously feeding silicon starting material to said material feeding section, the improvement wherein temperatures of said material feeding section and said molten silicon are maintained higher than a melting point of silicon by at least more than 12.degree. C.

公开(公告)号：US09389169B2

公开(公告)日：2016-07-12

申请号：US13637921

申请日：2011-02-25

申请人： Akira Kazama ,  Kaoru Tanaka ,  Jun Sakai

发明人： Akira Kazama ,  Kaoru Tanaka ,  Jun Sakai

IPC分类号： H04N7/18 ,  G01N21/21 ,  G01N21/84 ,  G01N21/89

CPC分类号： G01N21/21 ,  G01N21/8422 ,  G01N21/8901 ,  G01N21/8914 ,  G01N2021/8918

摘要： A surface inspection method for a steel sheet coated with a resin, includes irradiating the steel sheet with sheet-like light, which has been linearly polarized at a predetermined polarization angle, at an incidence angle different from Brewster's angle of the coating by a predetermined angle or greater; and imaging linearly-polarized light of a polarization angle of 0 degrees at an acceptance angle different from a regular reflection angle of incident light by a predetermined angle. Accordingly, it is not necessary to change the incidence angle and the acceptance angle depending on resin components and it is possible to inspect a substrate steel surface of the steel sheet highly accurately without observing abnormalities in the coating itself.

摘要翻译： 对涂布有树脂的钢板进行表面检查的方法包括以与预定角度的布鲁斯特角不同的入射角将已经以预定偏振角线性偏振的片状光照射在钢板上 或更大; 将偏振角为0度的线偏振光成像在与入射光的规则反射角度不同的接受角度的预定角度。 因此，不需要根据树脂成分改变入射角和接受角度，并且可以高精度地检查钢板的基板钢表面，而不会观察到涂层本身的异常。