摘要:
The present invention relates to a method and apparatus for manufacturing silicon single crystals by the Czochralski method, including the steps of dividing a crucible containing molten silicon into an inner single crystal growing section and an outer material feeding section to allow said molten silicon to move slowly, and pulling a silicon single crystal from said single crystal growing section while continuously feeding silicon starting material to said material feeding section, the improvement wherein temperatures of said material feeding section and said molten silicon are maintained higher than a melting point of silicon by at least more than 12.degree. C.
摘要:
According to the present invention, the inside of a crucible in which a molten raw material is placed is partitioned off with a partition ring so that a pulled single crystal is surrounded and the molten raw material may be moved and granular silicon is supplied to the outside of the partition ring, thereby to form the whole surface of outside molten liquid as a granular silicon soluble region so as to maintain the molten liquid surface on the inside of the partition ring at almost a constant level, and also to set the temperature of the molten liquid on the outside of the partition ring higher than the temperature of the inside thereof at least by 10.degree. C. or higher by covering the partition ring and the molten liquid surface on the outside thereof with a heat keeping board.
摘要:
Method for manufacturing a large columner silicon single crystal having a diameter of 12 cm-30 cm by pulling up a crystal, growing, and rotating it in one direction, from molten silicon material in a quartz crucible rotating in the other direction. The inside of the quartz crucible is divided into two sections--the peripheral section for feeding and melting raw materials and the central section for growing and pulling the crystal--by means of a cylindrical partition. The material feeding and melting section and the partition are sufficiently covered by an insulating board to reduce radiant energy heat loss and to keep the temperature at least above the freezing point of the molten materials in order to prevent the molten materials from solidifying at or around the inner wall of the cylindrical partition.
摘要:
A silicon single crystal manufacturing apparatus which pulls a large-diameter silicon single crystal with improved yield and efficiency according to the rotary CZ method.As a means of preventing the solidification of molten silicon in the vicinity of a partition member, that is, one of factors which deteriorate the yield and efficiency, a heat shielding member having a predetermined position and shielding width is arranged to face a meniscus position of molten silicon thereby shielding the heat radiation from the meniscus portion.Its shape is a cylindrical shape, truncated-cone shape or a shape formed at its cylindrical bottom with a flange having a central opening.Its material primarily consists of a metal such as molybdenum or tantalum or an electric resistance heater.
摘要:
An apparatus for making a silicon single crystal large in diameter dependently on the Czochralski process, wherein appropriate openings (11) are provided on the warmth keeping over (10) so as to prevent an undesirable influence caused by atmospheric gas. The major elements of the apparatus are that the sum of areas of the openings (11) is larger than the area of gap (18) formed between the lower end of the warmth keeping cover (10) and the level of silicon solution, and that the warmth keeping cover and the heat insulating member (12) are composed of sheet metal.
摘要:
A silicon single crystal manufacturing apparatus according to the CZ method which includes a partition member for dividing a quartz crucible into a single crystal growing section and a material melting section and having at least one small hole for permitting the passage of molten silicon, and a heat keeping cover for covering the partition member and the material melting section. The heat keeping cover is made of a sheet of metal selected from the group consisting of Ta, Mo and W and containing Fe 50 ppm or less and Cu 10 ppm or less. The metal sheet includes a surface layer composed of a silicon-enriched layer, and the depth of an area of the silicon-enriched layer in which the content of Si is greater than the contents of Fe and Cu at the same position therein is not less than 10 .mu.m from the surface. The content of Fe in the silicon-enriched layer is not greater than 5 ppm. Thus, this is the apparatus for manufacturing silicon single crystals, being very low in oxidation induced stacking fault (OSF) density.
摘要:
An image forming apparatus having a drawer unit that includes therein a paper-feeding conveying path for conveying a recording medium conveyed from a paper feeding unit on which the recording media are stacked to an image forming unit and/or a discharge conveying path for conveying the recording medium on which an image has been formed to a discharging unit, and be drawn out from an apparatus main body; a lock unit that locks the drawer unit to the apparatus main body; a straddle detecting unit that detects whether the recording medium straddles a conveying path in the apparatus main body and a conveying path in the drawer unit; and a controller that controls the lock unit to lock the drawer unit to the apparatus main body when the straddle detecting unit detects the straddle.
摘要:
A medium circulating apparatus of engine oil, which improves startability and warm up ability of an internal combustion engine, includes a microbubble generator that generates microbubbles and mixes the microbubbles into the circulating engine oil. Further, the medium circulating apparatus includes a medium temperature acquiring unit that acquires a temperature of the engine oil. The microbubbles are generated by the microbubble generator when the temperature of the engine oil is less than or equal to a predetermined value in order to decrease a viscosity, a heat conductivity, and a heat capacity of the engine oil in which the microbubbles are mixed.
摘要:
A digital broadcast receiver capable of reducing time and labor to back-up contents recorded on one recording medium to another recording medium. A digital broadcast receiver extracts the contents recorded, out of order, on a first recording medium by an extracting unit according to the titles or genres recorded in a content list, and automatically rearranges the extracted contents using an arranging unit according to video-recording date-and-hour recorded in the content list, for recording as a content list onto a second recording medium (300).
摘要:
A polymerization catalyst composition for a radically polymerizable monomer of the present invention comprises a transition metal-containing phosphazenium composition which is produced by mixing a phosphazenium compound with a compound of a transition metal belonging to Groups 4 to 12 in the periodic table and an organic halogen compound.