发明授权
- 专利标题: Method and apparatus for manufacturing silicon single crystals
- 专利标题(中): 制造硅单晶的方法和装置
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申请号: US343833申请日: 1989-04-26
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公开(公告)号: US5087429A公开(公告)日: 1992-02-11
- 发明人: Hiroshi Kamio , Kenji Araki , Yoshinobu Shima , Makoto Suzuki , Akira Kazama , Shigetake Horie , Yasumitsu Nakahama
- 申请人: Hiroshi Kamio , Kenji Araki , Yoshinobu Shima , Makoto Suzuki , Akira Kazama , Shigetake Horie , Yasumitsu Nakahama
- 申请人地址: JPX Tokyo
- 专利权人: NKK Corporation
- 当前专利权人: NKK Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX63-104278 19880428; JPX63-112614 19880511; JPX63-130269 19880530; JPX63-131653 19880531; JPX63-208446 19880824
- 主分类号: C30B15/00
- IPC分类号: C30B15/00 ; C30B15/02 ; C30B15/12 ; C30B15/14
摘要:
The present invention relates to a method and apparatus for manufacturing silicon single crystals by the Czochralski method, including the steps of dividing a crucible containing molten silicon into an inner single crystal growing section and an outer material feeding section to allow said molten silicon to move slowly, and pulling a silicon single crystal from said single crystal growing section while continuously feeding silicon starting material to said material feeding section, the improvement wherein temperatures of said material feeding section and said molten silicon are maintained higher than a melting point of silicon by at least more than 12.degree. C.
公开/授权文献
- US6152804A Grinding method and grinding apparatus 公开/授权日:2000-11-28
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