发明授权
US5432379A MIM-type electric device production thereof, and electronic apparatus
employing the device
失效
MIM型电气装置的生产以及采用该装置的电子设备
- 专利标题： MIM-type electric device production thereof, and electronic apparatus employing the device
- 专利标题（中）： MIM型电气装置的生产以及采用该装置的电子设备
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申请号： US305284申请日： 1994-09-14
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公开(公告)号： US5432379A公开(公告)日： 1995-07-11
- 发明人: Ken Eguchi , Haruki Kawada , Tsutomu Ikeda , Kiyoshi Takimoto , Toshihiko Takeda
- 申请人： Ken Eguchi , Haruki Kawada , Tsutomu Ikeda , Kiyoshi Takimoto , Toshihiko Takeda
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-278890 19911001; JPX4-247200 19920825
- 主分类号： H01J1/312
- IPC分类号： H01J1/312 ; C30B7/00 ; G02F1/1365 ; H01J1/30 ; H01J9/02 ; H01J29/04 ; H01J31/12 ; H01J31/15 ; H01J37/073 ; H01L45/00 ; H01L49/02 ; H01L23/48 ; H01L29/40
摘要：
An MIM type electric element has an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor. The lower electrode contains a noble metal crystal having a facet of a plate-shaped crystal formed on a substrate. The facet has a plane given by the crystal face (111) and contains a region having a plane orientation variance angle of not more than 1.degree. by X-ray diffraction.
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