发明授权
- 专利标题： Polymeric metal oxide materials and their formation and use
- 专利标题（中）： 聚合金属氧化物材料及其形成和用途
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申请号： US229092申请日： 1994-04-18
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公开(公告)号： US5460877A公开(公告)日： 1995-10-24
- 发明人: Tomoji Oishi , Ken Takahashi , Tetsuo Nakazawa , Shigeru Tanaka , Tadahiko Miyoshi
- 申请人： Tomoji Oishi , Ken Takahashi , Tetsuo Nakazawa , Shigeru Tanaka , Tadahiko Miyoshi
- 申请人地址： JPX Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX1-211356 19890818; JPX2-181454 19900711
- 主分类号： C01B13/14
- IPC分类号： C01B13/14 ; B01J13/00 ; B01J19/12 ; C01B13/10 ; C01B13/32 ; C01B17/20 ; C01B33/12 ; C01G15/00 ; C01G19/02 ; C01G23/04 ; C01G30/00 ; C03C17/22 ; C03C17/25 ; C03C25/10 ; C07F19/00 ; F02B75/02 ; G02B1/11 ; G11B7/26 ; H01B3/10 ; H01G2/12 ; H01G4/10 ; H01G4/33 ; H01L21/3105 ; H01L21/316 ; H01L21/3205 ; H01L23/29 ; H01L23/31 ; H05B33/10 ; H05B33/12 ; H05B33/14 ; H05B33/22 ; H05K1/03 ; B32B15/00
摘要：
A method of treating a metal alkoxide solution to form metal oxide prepolymer molecules therein is characterized by irradiating the solution with light energy having a wavelength selected to break the metal-alkoxy group bond in said metal alkoxide, thereby to form the metal oxide prepolymer molecules in the solution. The prepolymer is converted into polymeric metal oxide gel. The stoichiometry of the oxide is high. A gel of carbon content below 4 atomic % can be achieved by the step of decarbonizing the gel, preferably using light to produce ozone.
公开/授权文献
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