发明授权
- 专利标题: Method for the growth of industrial crystals
- 专利标题(中): 工业晶体生长方法
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申请号: US454775申请日: 1995-05-31
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公开(公告)号: US5614019A公开(公告)日: 1997-03-25
- 发明人: Miroslav Vichr , David S. Hoover
- 申请人: Miroslav Vichr , David S. Hoover
- 申请人地址: PA Allentown
- 专利权人: Air Products and Chemicals, Inc.
- 当前专利权人: Air Products and Chemicals, Inc.
- 当前专利权人地址: PA Allentown
- 主分类号: C30B25/02
- IPC分类号: C30B25/02 ; C30B25/04 ; C30B25/18 ; C30B25/20 ; C30B29/04 ; C30B33/08 ; H01L21/205 ; H01L21/314 ; C30B25/06
摘要:
A method is disclosed for producing large single crystals. According to the initial steps of this method, a plurality of single crystal wafers are crystallographically oriented to form a seed plate which is patterned. The patterned seed plate is selectively etched to expose the bare surface of the seed plate. The exposed, patterned bare surface of the seed plate is etched to form a plurality of nucleation structures. Each of the nucleation structures protrude outwardly from the underlying surface of the seed plate and provide ideal structures for the growth of large, single crystals. The resulting large, single crystals can be separated from the seed crystals by etching, physical or chemical means.
公开/授权文献
- US5008440A Herbicide composition 公开/授权日:1991-04-16
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