发明授权
- 专利标题: Magnetic levitation conveyor apparatus
- 专利标题(中): 磁悬浮输送装置
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申请号: US362451申请日: 1995-03-07
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公开(公告)号: US5641054A公开(公告)日: 1997-06-24
- 发明人: Satoshi Mori , Masao Matsumura , Yoichi Kanemitsu , Takeshi Yoshioka , Masaaki Kajiyama , Fumio Kondo , Yuji Shirao , Masato Eguchi , Hiroyuki Shinozaki , Yukio Ikeda , Masayoshi Hirose , Masaru Nakaniwa , Norio Kimura , Katsuaki Usui , Katsuyuki Aoki
- 申请人: Satoshi Mori , Masao Matsumura , Yoichi Kanemitsu , Takeshi Yoshioka , Masaaki Kajiyama , Fumio Kondo , Yuji Shirao , Masato Eguchi , Hiroyuki Shinozaki , Yukio Ikeda , Masayoshi Hirose , Masaru Nakaniwa , Norio Kimura , Katsuaki Usui , Katsuyuki Aoki
- 申请人地址: JPX Tokyo
- 专利权人: Ebara Corporation
- 当前专利权人: Ebara Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX4-202989 19920707; JPX4-206010 19920709; JPX4-208472 19920713; JPX4-210954 19920715; JPX4-213624 19920718; JPX4-228042 19920804; JPX4-296405 19921008; JPX4-304640 19921016; JPX4-333715 19921119; JPX5-023721 19930119; JPX5-049895 19930217
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/677 ; B65G35/00
摘要:
A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.
公开/授权文献
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