摘要:
A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.
摘要:
A predetermined amount of liquid such as water is supplied to a backside surface of a workpiece such as a semiconductor wafer. Such liquid is a workpiece retaining liquid and is attached to a concave workpiece holding surface of a top ring. The workpiece is positioned between a turntable and the top ring and is polished by an abrasive cloth on the turntable while the workpiece is being pressed against the turntable by the top ring. While polishing, the workpiece is deformed toward the concave workpiece holding surface of the top ring, and a curvature of the deformed workpiece is controlled by the amount of liquid between the workpiece holding surface and the backside surface of the workpiece.
摘要:
A compact polishing apparatus requires less operating space than a conventional polishing apparatus generally used for polishing semiconductor wafers. The present apparatus has a swing shaft to provide a swing motion to a pressing device including a top ring member. There are three ranges of swing motion, i.e. a polishing range which is a small motion range used for polishing a wafer within the confined area of a turntable, a receiving range which is a medium motion range used for loading/unloading of a wafer in an area beyond the turntable, and a standby range which is a large motion range used for moving the top ring member to a standby or rinsing position in an area beyond the turntable. Because of the swing-based arrangement of the components in the present apparatus, isolation of critical components is easily achieved, thus resulting in low maintenance costs and long service life of the present apparatus. These advantages offer significant cost savings in the management of polishing operations.
摘要:
A waste treatment system in a polishing apparatus treats waste gas and waste liquid discharged from the polishing apparatus. The waste treatment system comprises an exhaust duct provided in a partition wall enclosing the polishing apparatus, a scrubber connected to the exhaust duct through an exhauster for scrubbing waste gas discharged from the polishing apparatus, a waste liquid receiver provided below an abrasive cloth of the polishing apparatus for receiving waste liquid generated by a polishing operation and a waste liquid treatment apparatus connected to the waste liquid receiver for treating the waste liquid discharged from the polishing apparatus.
摘要:
Provided are a method for producing a sanshool, which method has a short process and exhibits high stereoselectivity, as well as an iron carbonyl complex compound that is an intermediate useful for the production method.A diene iron complex compound characterized by being represented by the following general formula (I): (in which A represents CO, P(RA)3, CN, NO, SO(RA)3, or N(RA)2; RA represents a straight chain or branched chain alkyl group having 1 to 4 carbon atoms or an aryl group having 6 to 12 carbon atoms; and one of R1 and R2 represents a hydrogen atom and the other one thereof represents a structure represented by the following formula (II)): (in which R represents a hydrogen atom, a hydroxyl group, or a methyl group).
摘要翻译:本发明提供了一种生产方法,该方法具有短的工艺并具有高立体选择性,以及作为制备方法有用的中间体的羰基铁配合物。 一种二烯铁络合物,其特征在于由以下通式(I)表示:(其中A表示CO,P(RA)3,CN,NO,SO(RA)3或N(RA)2) 具有1至4个碳原子的直链或支链烷基或具有6至12个碳原子的芳基; R 1和R 2之一表示氢原子,并且其中之一表示由下式(II )):(其中R表示氢原子,羟基或甲基)。
摘要:
A cathode ray tube has, on an external surface of a face-panel, an anti-reflection film in which a layer mainly consisting of SiO2 is laminated on a transparent conductive layer that includes at least one of colored ITO and colored ATO, and a coloring matter that has a color that is a complementary color with respect to the colors of ITO and/or ATO. As the colored ITO and/or colored ATO, one that has a particle diameter of from 10 to 500 nm is employed. In addition, as the coloring matter, a dyestuff that has the maximum absorption in the wavelength range of 550 to 600 nm or the like is employed. Value of surface resistance of the anti-reflection film is preferable to be 1×106 &OHgr;/sq or less. A cathode ray tube having such an anti-reflection film can prevent effectively AEF from occurring and realize an improved contrast and comfortable body color.
摘要:
An operation controller for an air conditioner designed to decrease a difference between an ambient temperature and a set temperature by varying the number of revolutions of a compressor, includes: a means for calculating an operation ratio of the compressor; and a means for determining the range of varying an operation frequency of the compressor in accordance with the operation ratio.
摘要:
An air conditioning apparatus comprises a plurality of outlet ports, a blowing fan for blowing off an conditioned air from the outlet ports to the outside of the main body of the apparatus, an air directing plate arranged in at least one of the outlet ports to enable the direction of the conditioned air to change, an operation state detecting device for detecting the operation state of the main body, and a driving device for adjusting the position of the air directing plate, depending on signals from the operation state detecting device.
摘要:
On the surface of a core particle of a toner particle, a silane coupling agent treatment layer, a coating layer of thermoplastic resin microparticles applied to the core particle and a charge control agent added to the coating layer through the silane coupling agent treatment layer are provided, wherein the toner particle has a particle diameter of 1 to 10 μm, or on the surface of a core particle of a toner particle, a coating layer of thermoplastic resin microparticles and a charge control agent added to the coating layer and made of an organic compound containing at least one type of lanthanoid metal are provided, or on a ZnS type fluorescent body core particle, a coating layer of thermoplastic resin microparticles and a charge control agent added to the coating layer and including a metal compound containing the IIA metal or IIIA group metal are provided.
摘要:
The present invention provides a fuel gasification furnace including a gasification chamber (1) for fluidizing a high-temperature fluidizing medium therein to form a gasification chamber fluidized bed having an interface, and for gasifying a fuel in the gasification chamber fluidized bed, a char combustion chamber (2) for fluidizing a high-temperature fluidizing medium therein to form a char combustion chamber fluidized bed having an interface, and for combusting char generated by gasification in the gasification chamber (1) in the char combustion chamber fluidized bed to heat the fluidizing medium, and a first energy recovery device (109) for using gases generated by the gasification chamber (1) as a fuel. The gasification chamber (1) and the char combustion chamber (2) are integrated with each other. The gasification chamber (1) and the char combustion chamber (2) are divided from each other by a first partition wall (15) for preventing gases from flowing therebetween, and which extends vertically upward from the interfaces of the respective fluidized beds. The first partition wall (15) has a first opening (25) provided in a lower portion thereof, and the first opening (25) serves as a communication between the gasification chamber (1) and the char combustion chamber (2), for allowing the fluidizing medium heated in the char combustion chamber (2) to move from the char combustion chamber (2) via the first opening (25) into the gasification chamber (1).