公开(公告)号：US5641054A

公开(公告)日：1997-06-24

申请号：US362451

申请日：1995-03-07

申请人： Satoshi Mori ,  Masao Matsumura ,  Yoichi Kanemitsu ,  Takeshi Yoshioka ,  Masaaki Kajiyama ,  Fumio Kondo ,  Yuji Shirao ,  Masato Eguchi ,  Hiroyuki Shinozaki ,  Yukio Ikeda ,  Masayoshi Hirose ,  Masaru Nakaniwa ,  Norio Kimura ,  Katsuaki Usui ,  Katsuyuki Aoki

发明人： Satoshi Mori ,  Masao Matsumura ,  Yoichi Kanemitsu ,  Takeshi Yoshioka ,  Masaaki Kajiyama ,  Fumio Kondo ,  Yuji Shirao ,  Masato Eguchi ,  Hiroyuki Shinozaki ,  Yukio Ikeda ,  Masayoshi Hirose ,  Masaru Nakaniwa ,  Norio Kimura ,  Katsuaki Usui ,  Katsuyuki Aoki

IPC分类号： H01L21/00 ,  H01L21/677 ,  B65G35/00

CPC分类号： H01L21/67167 ,  H01L21/67184 ,  H01L21/67709 ,  H01L21/67736

摘要： A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.

摘要翻译： PCT No.PCT / JP93 / 00930 Sec。 371日期：1995年3月7日 102（e）1995年3月7日PCT PCT 1993年7月6日PCT公布。 第WO94 / 01354号公报 日期1994年1月20日磁悬浮输送装置具有设置在隧道外部的悬浮电磁体，线性电动机和位移传感器，以及可在隧道中移动的简单结构的滑架。 滑架是用于防止产生气体的罐头结构。 罐头结构的支架允许隧道具有减小的横截面积，并且填充有高度净化的气氛，例如高真空。 隧道在分支点处具有大致正交的分支。 在分支点，托架可以在与主输送机通道分支输送通道的方向改变的同时被提升而不与隧道隔板接触。 磁悬浮输送装置是高度实用的，因为它可以如上所述地控制滑架被提升和移动。

公开(公告)号：US5223758A

公开(公告)日：1993-06-29

申请号：US665213

申请日：1991-03-05

申请人： Takashi Kataoka ,  Yuji Shirao ,  Daisuke Konno ,  Yoshio Sato ,  Yoichi Kanemitsu ,  Hideo Tsuboi ,  Shunichi Aiyoshizawa ,  Kazuyuki Kasahara

发明人： Takashi Kataoka ,  Yuji Shirao ,  Daisuke Konno ,  Yoshio Sato ,  Yoichi Kanemitsu ,  Hideo Tsuboi ,  Shunichi Aiyoshizawa ,  Kazuyuki Kasahara

IPC分类号： H02K5/167 ,  F16C17/02 ,  F16C33/10 ,  F16C39/06 ,  H02K5/16 ,  H02K7/09 ,  H02K21/22

CPC分类号： F16C32/044 ,  F16C17/02 ,  F16C17/107 ,  F16C25/045 ,  F16C32/0402 ,  F16C33/107 ,  H02K5/165 ,  H02K7/09

摘要： A spindle motor has a rotor supported by a stator through a thrust bearing and a radial bearing. At least the thrust bearing is a hydrodynamic bearing. The spindle motor is provided with a device for adjusting the thrust laod that is applied to the thrust bearing. The load adjusting device has an electromagnet that is provided on the stator and a permanent magnet that is provided on the rotor in opposing relation to the electromagnet. Either the repelling force or the attraction force, which acts between the electromagnet and the permanent magnet, is controlled by changing the current supplied to the electromagnet.

公开(公告)号：US5194805A

公开(公告)日：1993-03-16

申请号：US633849

申请日：1990-12-26

申请人： Atsushi Nakajima ,  Minoru Takizawa ,  Chikara Murakami ,  Yoichi Kanemitsu ,  Yuji Shirao

发明人： Atsushi Nakajima ,  Minoru Takizawa ,  Chikara Murakami ,  Yoichi Kanemitsu ,  Yuji Shirao

IPC分类号： G01D5/22

CPC分类号： G01D5/2208

摘要： An inductance-type displacement sensor which can measure the displacement of a measured object of magnetic material without any contact with the object. A pair of series connected coils is provided adjacent to the object so that the inductance of the coils varies in response to a displacement of the object from a predetermined position. The inductance, the number of windings, the direction of the windings and the section of each of the cores are so set that the magnetic flux produced by one of the coils runs in a direction opposite to that of the magnetic flux produced by the other coil and the densities of the respective magnetic fluxes are identical with each other.

公开(公告)号：US5152679A

公开(公告)日：1992-10-06

申请号：US740779

申请日：1991-08-06

申请人： Yoichi Kanemitsu ,  Yuji Shirao

发明人： Yoichi Kanemitsu ,  Yuji Shirao

IPC分类号： F04D19/04 ,  F04D29/048 ,  F04D29/056 ,  F16C32/04 ,  F16C39/02 ,  F16C39/06 ,  H02K7/09

CPC分类号： F04D19/048 ,  F16C32/0425 ,  F16C32/0442 ,  F16C32/0478 ,  F16C39/063 ,  H02K7/09 ,  F16C2360/45 ,  F16C39/02

摘要： A turbo molecular pump includes a magnetic bearing system which includes a rotor having an impeller connected to a shaft and a motor. A stator is positioned between the shaft and the impeller. Radial magnetic bearings, an active axial magnetic bearing and emergency bearings are each provided between the rotor and the stator. The radial magnetic bearings include passive magnetic bearings provided on the rotor and the stator respectively. The axial magnet bearing is disposed in the vicinity where the impeller is connected to the shaft. The emergency bearings are disposed on a low vacuum side with one emergency bearing being positioned near the axial magnetic bearing. A diameter of the shaft is made smaller than an inside diameter of the emergency bearing near the axial magnetic bearing. By this arrangement, only one control axis is necessary for controlling the position of the rotor. Disassembling of the shaft and impeller is easy and contamination of the high vacuum side can be prevented.

公开(公告)号：US5397212A

公开(公告)日：1995-03-14

申请号：US19678

申请日：1993-02-19

申请人： Katsuhide Watanabe ,  Yoichi Kanemitsu ,  Hiroyuki Shinozaki ,  Naoji Hiraki ,  Shinichi Moriyama

发明人： Katsuhide Watanabe ,  Yoichi Kanemitsu ,  Hiroyuki Shinozaki ,  Naoji Hiraki ,  Shinichi Moriyama

IPC分类号： B25J9/04 ,  B25J9/12 ,  B25J18/04

CPC分类号： H01L21/67766 ,  B25J9/041 ,  B25J9/123 ,  B25J9/126 ,  F16C32/0465 ,  H01L21/67742

摘要： A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.

摘要翻译： 没有机械接触部件的机器人适用于特殊环境，如半导体制造过程，其中灰尘和润滑是重要关注的问题。 机器人具有由磁性轴承构成的线性致动器和用于在不机械接触的情况下线性地移动机器人手臂的线性电动机，以及由磁性轴承和用于使支撑线性致动器的主体旋转的旋转电动机，围绕旋转致动器 无机械接触。

公开(公告)号：US5127792A

公开(公告)日：1992-07-07

申请号：US676458

申请日：1991-03-26

申请人： Seigo Katsuta ,  Yoichi Kanemitsu ,  Masao Matsumura

发明人： Seigo Katsuta ,  Yoichi Kanemitsu ,  Masao Matsumura

IPC分类号： F04D15/00 ,  F04D29/04 ,  F04D29/048 ,  F04D29/049 ,  F16C39/06

CPC分类号： F04D29/048 ,  F04D29/049 ,  F16C32/0476 ,  F16C2360/42 ,  F16C2360/44

摘要： A cemtrifugal pump in which the thrust generated by an impeller is balanced by the operation of a balancing disc device. In the pump, a magnetic bearing is employed as an axial thrust bearing. The distance between the surface of a balancing disc and an axial displacement detecting surface which, together with the pump shaft, and the distance between such surface of a balancing disc seat is a fixed-side member which faces the balancing disc surface. The surface of a displacement sensor is another fixed-side member which faces the axial displacement detecting surface and are made equal to each other, or the latter distance is made slightly larger than the former distance. The neutral position of the magnetic thrust bearing is made to substantially coincide with the axial position of the rotator of the pump and is determined by the balancing disc device during running of the pump. By these arrangements, the position of the stator is determined by the balancing disc device during normal operation of the pump, whereas the position is determined by the magnetic thrust bearing when the pump is at rest or in a transient running state.

摘要翻译： 一种离心泵，其中由叶轮产生的推力通过平衡盘装置的操作来平衡。 在泵中，使用磁轴承作为轴向推力轴承。 平衡盘的表面与轴向位移检测表面之间的距离，其与泵轴一起以及平衡盘座的这种表面之间的距离是面向平衡盘表面的固定侧构件。 位移传感器的表面是面向轴向位移检测表面并且彼此相等的另一固定侧构件，或者将后一距离略大于前一距离。 磁力推力轴承的中立位置使其基本上与泵的旋转器的轴向位置一致，并且在泵运行期间由平衡盘装置确定。 通过这些布置，定子的位置由泵的正常操作期间的平衡盘装置确定，而当泵处于静止或处于暂时运行状态时，该位置由磁性推力轴承确定。

公开(公告)号：US5630881A

公开(公告)日：1997-05-20

申请号：US289215

申请日：1994-08-12

申请人： Naoaki Ogure ,  Yoichi Kanemitsu

发明人： Naoaki Ogure ,  Yoichi Kanemitsu

IPC分类号： H01L21/205 ,  C23C16/458 ,  H01L21/31 ,  H01L21/683 ,  H01L21/687 ,  C23C16/00

CPC分类号： H01L21/68792 ,  C23C16/4584 ,  H01L21/6831

摘要： A thin-film forming device including a reaction chamber having an atmosphere different from that in the outside world, a susceptor rotatably disposed in the reaction chamber for mounting a substrate thereon to form a thin film thereon, and a nozzle disposed within the reaction chamber facing the susceptor for supplying a thin-film forming material on the substrate, the thin-film forming device comprises: a levitating means including magnetic bearings for non-contact support of the susceptor; and a driving means for rotating the susceptor at high speed, to thereby increase the rotational speed of the susceptor and the thin-film forming rate.

摘要翻译： 一种薄膜形成装置，包括具有与外界不同的气氛的反应室，可旋转地设置在反应室中的基座，用于在其上安装基板以在其上形成薄膜，以及设置在反应室内的喷嘴， 用于在基板上供给薄膜形成材料的基座，所述薄膜形成装置包括：悬浮装置，包括用于所述基座的非接触支撑的磁性轴承; 以及用于高速旋转基座的驱动装置，从而提高基座的旋转速度和薄膜形成速度。

公开(公告)号：US5720010A

公开(公告)日：1998-02-17

申请号：US699342

申请日：1996-08-19

申请人： Katsuhide Watanabe ,  Yoichi Kanemitsu ,  Shinichi Moriyama ,  Naoji Hiraki

发明人： Katsuhide Watanabe ,  Yoichi Kanemitsu ,  Shinichi Moriyama ,  Naoji Hiraki

IPC分类号： B25J13/00 ,  B25J9/18 ,  B25J18/02 ,  B25J19/00 ,  F16C32/04 ,  F16C39/06 ,  G05B19/19 ,  H02P25/06 ,  G05B15/00 ,  G05B19/00

CPC分类号： F16C32/0444 ,  G05B19/19 ,  F16C2300/62 ,  G05B2219/45083 ,  G05B2219/49271

摘要： A control system for controlling a linear actuator including magnetic bearings for levitating a robot arm and a pulse motor for linearly driving the arm in a non-contact manner is disclosed, which comprises a displacement detection unit including displacement sensors, first and second calculation units, moving amount detection unit and adding circuit. The displacement detection unit detects displacement values of the arm from a reference posture, the first calculation unit calculates guiding (y), levitation (z), roll (p), pitching (q), and yaw (r) control current values in response to the displacement values and provides guiding, levitation, roll, pitching, and yaw control current signals (, , , , ). The moving amount detecting circuit detects a moving amount (X.sub.0) of the arm from a reference position in response to an operation of the pulse motor, and provides a compensation current value (.DELTA.Iq") proportional to the moving amount, and the adding circuit adds the compensation current value (.DELTA.Iq") to the pitching control current signal (). The second calculation unit, in response to the guiding, levitation, roll and yaw control current signals (, , , ) and the added pitching control current signal (+.DELTA.Iq"), calculates drive current control values to compensate drive current flowing through the magnetic bearings.

摘要翻译： 公开了一种用于控制线性致动器的控制系统，包括用于悬浮机器人臂的磁轴承和用于以非接触方式线性驱动臂的脉冲电机，其包括位移检测单元，其包括位移传感器，第一和第二计算单元， 移动量检测单元和加法电路。 位移检测单元从参考姿势检测臂的位移值，第一计算单元计算响应中的引导（y），悬浮（z），滚动（p），俯仰（q）和偏航（r）控制电流值 提供位移值，并提供引导，悬挂，滚动，俯仰和偏航控制电流信号（+ Z，+ Z，+ Z，+ Z，+ Z）。 移动量检测电路响应于脉冲电动机的操作从参考位置检测臂的移动量（X0），并且提供与移动量成比例的补偿电流值（DELTA Iq“），并且添加 电路将补偿电流值（DELTA Iq“）添加到俯仰控制电流信号（+ Z）。 第二计算单元响应于引导，悬挂，转向和偏转控制电流信号（+ Z，+ Z，+ Z，+ Z）和增加的俯仰控制电流信号（+ Z + DELTA Iq“），计算 驱动电流控制值来补偿流经磁轴承的驱动电流。

公开(公告)号：US5793598A

公开(公告)日：1998-08-11

申请号：US695850

申请日：1996-08-09

申请人： Katsuhide Watanabe ,  Yoichi Kanemitsu ,  Takahide Haga ,  Kenichi Yano ,  Takayuki Mizuno ,  Ryuta Katamura

发明人： Katsuhide Watanabe ,  Yoichi Kanemitsu ,  Takahide Haga ,  Kenichi Yano ,  Takayuki Mizuno ,  Ryuta Katamura

IPC分类号： F16F15/02 ,  F16F15/03 ,  B66C13/06

CPC分类号： F16F15/02 ,  F16F15/03

摘要： A magnetically levitated vibration damping apparatus includes a table having a flat board of a magnetic material, an electromagnetic actuator for applying magnetic attractive forces to the flat board to levitate the table, a displacement sensor for detecting relative displacement between the flat board and the electromagnetic actuator, an acceleration sensor for detecting absolute acceleration of the table, and a control system for controlling a current supplied to the electromagnetic actuator based on signals from the displacement sensor and the acceleration sensor according to a first control rule for controlling a gap between the flat board and the electromagnetic actuator based on the signal from the acceleration sensor and a second control rule for controlling vibrations of the table based on the signal from the acceleration sensor, the second control rule including stability control of relative displacement of the table.

摘要翻译： 一种磁悬浮减振装置，包括具有磁性材料的平板的工作台，用于向平板施加磁性吸引力以浮动工作台的电磁致动器，用于检测平板与电磁致动器之间的相对位移的位移传感器 ，用于检测工作台的绝对加速度的加速度传感器，以及用于根据用于控制平板之间的间隙的第一控制规则，根据来自位移传感器和加速度传感器的信号控制提供给电磁致动器的电流的控制系统 以及基于来自加速度传感器的信号的电磁致动器和用于基于来自加速度传感器的信号控制工作台的振动的第二控制规则，第二控制规则包括对工作台的相对位移的稳定性控制。

公开(公告)号：US5765800A

公开(公告)日：1998-06-16

申请号：US724829

申请日：1996-10-02

申请人： Katsuhide Watanabe ,  Yoichi Kanemitsu ,  Takahide Haga ,  Mamoru Suzuki

发明人： Katsuhide Watanabe ,  Yoichi Kanemitsu ,  Takahide Haga ,  Mamoru Suzuki

IPC分类号： F16F15/023 ,  F16M13/00

CPC分类号： F16F15/0232

摘要： A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.

摘要翻译： 减震装置具有用于放置要与振动隔离的物体的隔振台，安装在安装地板上的空气弹簧和支撑用于衰减来自安装地板的振动的防振台，空气压力控制器 用于控制所述空气弹簧的空气压力的位移传感器，用于检测所述防振台和所述安装地板之间的相对位移并将指示所述检测到的相对位移的信号提供给所述空气压力控制器的位移传感器;以及弹簧元件， 隔振台和用于水平定位防振台的安装地板。 电磁铁设置在防振台和安装地板之间，用于主动衰减隔振台的振动。 振动阻尼装置的作用是通过弹簧元件将隔振台水平放置，并通过空气弹簧垂直地定位。