发明授权
- 专利标题: High dielectric constant capacitor and a fabricating method thereof
- 专利标题(中): 高介电常数电容器及其制造方法
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申请号: US689155申请日: 1996-07-30
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公开(公告)号: US5686339A公开(公告)日: 1997-11-11
- 发明人: Chang-Jae Lee , Hwan Myeong Kim
- 申请人: Chang-Jae Lee , Hwan Myeong Kim
- 申请人地址: KRX Choongchungbook-do
- 专利权人: LG Semicon Co., Ltd.
- 当前专利权人: LG Semicon Co., Ltd.
- 当前专利权人地址: KRX Choongchungbook-do
- 优先权: KRX35981/1995 19951018
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/02 ; H01L21/205 ; H01L21/768 ; H01L21/822 ; H01L21/8242 ; H01L27/04 ; H01L27/108 ; H01L21/70
摘要:
A method for fabricating a capacitor of a semiconductor device, includes the steps of: forming a first insulating layer and then a second insulating layer on the first insulating layer; removing the second insulating layer of a first electrode region of a capacitor; forming a side wall at a side of the second insulating layer; etching the first insulating layer by using the side wall of the second insulating layer as a mask so as to form a contact hole; forming a first electrode of a capacitor on the side wall and on the contact hole; forming a dielectric layer on the first electrode of the capacitor; and forming a second electrode of the capacitor on the dielectric layer. And, a capacitor in a semiconductor device includes: a substrate; a first insulating layer being formed at an upper part of the substrate 20 and having a contact hole; a second insulating layer being formed at an upper part of the first insulating layer; side walls being formed at an upper part of the first insulating layer and at a side surface of the second insulating layer both in an arc-shape; a first electrode of a capacitor being formed on the contact hole and the side walls; a dielectric layer formed on the first electrode of the capacitor; and a second electrode of the capacitor being formed on the first electrode of the capacitor.
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