发明授权
- 专利标题： Instrument and mounting equipment used in clean room
- 专利标题（中）： 洁净室使用的仪器和安装设备
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申请号： US147061申请日： 1998-09-29
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公开(公告)号： US6077894A公开(公告)日： 2000-06-20
- 发明人: Misako Saito , Takenobu Matsuo , Tsuyoshi Wakabayashi , Sadao Kobayashi , Yoshihide Wakayama , Masayuki Imafuku
- 申请人： Misako Saito , Takenobu Matsuo , Tsuyoshi Wakabayashi , Sadao Kobayashi , Yoshihide Wakayama , Masayuki Imafuku
- 申请人地址： JPX Tokyo JPX Tokyo
- 专利权人： Tokyo Electron Limited,Taisei Corporation
- 当前专利权人： Tokyo Electron Limited,Taisei Corporation
- 当前专利权人地址： JPX Tokyo JPX Tokyo
- 优先权： JPX8-077558 19960329; JPX8-077559 19960329
- 主分类号： H01L21/68
- IPC分类号： H01L21/68 ; A43B1/14 ; A43B3/16 ; H01L21/67 ; H01L21/673 ; H01L21/677 ; C08K5/20
摘要：
There are instruments used for handling a substrate in a clean room at room temperature and atmospheric pressure, which contain a resin base and at least one additive selected from the group consisting of a lubricant, a plasticizer, an anti-oxidizing agent and an antistatic agent, and the additives do not generate gaseous organic material compound under conditions of room temperature and atmospheric pressure.
公开/授权文献
- US4791443A Photographic processor with auxiliary power supply 公开/授权日：1988-12-13
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