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    Electronic/electric components used in clean room and substrate treatment apparatus
    2.
    发明授权
    Electronic/electric components used in clean room and substrate treatment apparatus 失效
    用于洁净室和基板处理设备的电子/电气部件

    公开(公告)号：US06337365B1

    公开(公告)日：2002-01-08

    申请号：US09381667

    申请日：1999-09-24

    申请人： Takenobu Matsuo ,  Tsuyoshi Wakabayashi ,  Misako Saito ,  Sadao Kobayashi ,  Yoshihide Wakayama ,  Masayuki Imafuku

    发明人： Takenobu Matsuo ,  Tsuyoshi Wakabayashi ,  Misako Saito ,  Sadao Kobayashi ,  Yoshihide Wakayama ,  Masayuki Imafuku

    IPC分类号： C08L9106

    CPC分类号： C08K5/0075

    摘要： An electronic/electric part used in a clean room in which the atmosphere is controlled to process a substrate in a semiconductor device industry, which contains a resin base material and additives added to the resin base material. The additives contain one or more materials selected from the group consisting of an anti-electrostatic agent made of a nonionic compound of a molecular weight of 350 or higher, an anti-oxidizing agent made of a phenolic compound of a molecular weight of 300 or higher, a lubricant, a plasticizer, a fire retardant, and a water repellent. The additives hardly releases gaseous organic substances from the resin base material under a condition where the part is used.

    摘要翻译： 一种电子/电气部件，其用于在半导体器件工业中控制气氛以处理衬底的洁净室中，该半导体器件工业包含树脂基材和添加到树脂基材中的添加剂。 添加剂含有一种或多种选自由分子量为350以上的非离子化合物制成的抗静电剂的组分，由分子量为300以上的酚类化合物制成的抗氧化剂 润滑剂，增塑剂，阻燃剂和防水剂。 在使用该部件的条件下，添加剂在树脂基材中几乎不释放气态有机物质。

    Air filter
    3.
    发明授权
    Air filter 有权
    空气过滤器

    公开(公告)号：US06471740B2

    公开(公告)日：2002-10-29

    申请号：US09736647

    申请日：2000-12-13

    申请人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    发明人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    IPC分类号： B01D4600

    CPC分类号： B01D46/0001 ,  B01D39/10 ,  B01D39/1623 ,  B01D39/2017 ,  B01D46/06 ,  B01D46/10 ,  B01D2239/04 ,  B01D2239/0428 ,  B01D2239/0457 ,  B01D2239/0464 ,  B01D2239/0492 ,  B01D2239/0618 ,  B01D2239/086 ,  B01D2239/10 ,  B01D2271/02 ,  B01D2279/51 ,  D04H1/4218 ,  D06M13/02 ,  D06M13/11 ,  D06M13/148 ,  D06M13/224 ,  D06M15/227 ,  D06M15/507 ,  F24F3/161 ,  F24F13/28

    摘要： A material not releasing gaseous organic substances during use is used as a filter medium and a sealing material for tightly sealing between the medium and a frame. Specifically, a synthetic paraffin not containing an aliphatic hydrocarbon having not more than 19 carbon atoms or less is used as a non-silicone type water repellent contained in a treatment agent for forming fibers into a cloth-like filter medium. A carboxylic acid ester having 400 or more molecular weight is used as a plasticizer and a phenolic compound having 300 or more molecular weight is used as an antioxidant to be added to the treatment agent and the sealing material. This enables that the gaseous organic substances are not present in a clean room, a semiconductor production apparatus or the like. Further, if the filter medium and the sealing material are formed of a material not releasing organic phosphorus compounds and boron compounds in the air, a clean room and a local facility particularly suitable for use in the production of semiconductors are provided.

    摘要翻译： 使用在使用期间不释放气态有机物质的材料用作过滤介质和用于在介质和框架之间紧密密封的密封材料。 具体地说，不含有不超过19个碳原子的脂肪族烃的合成石蜡用作用于将纤维形成布状过滤介质的处理剂中所含的非硅氧烷型防水剂。 使用具有400以上分子量的羧酸酯作为增塑剂，使用具有300以上分子量的酚类化合物作为添加到处理剂和密封材料中的抗氧化剂。 这使得气体有机物质不存在于洁净室，半导体制造装置等中。 此外，如果过滤介质和密封材料由空气中不释放有机磷化合物和硼化合物的材料形成，则提供特别适合用于制造半导体的洁净室和本地设备。

    Building components useful for clean rooms
    4.
    发明授权
    Building components useful for clean rooms 失效
    建筑组件对洁净室有用

    公开(公告)号：US6155922A

    公开(公告)日：2000-12-05

    申请号：US90199

    申请日：1998-06-04

    申请人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    发明人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    IPC分类号： C09K3/10 ,  B01L1/04

    CPC分类号： C09K3/1009 ,  C09K3/10 ,  C09K3/1021 ,  C09K2200/0405 ,  C09K2200/0411 ,  C09K2200/0441 ,  C09K2200/0447 ,  C09K2200/0635 ,  C09K2200/0687

    摘要： Materials not releasing gaseous organic materials during use are used as a dry-type sealing material such as a gasket disposed upon mounting an air filter to an opening of a ceiling or the like, a wet-type sealing material filled and used in a gap for connecting wall materials or partitionings, a vinyl chloride sheet or a vinyl chloride cloth as a facing material for walls and floors. Specifically, a carboxylic acid ester having a molecular weight of not less than 400 is used as a plasticizer, a phenolic compound having a molecular weight of not less 300 is used as an antioxidant, an aliphatic hydrocarbon having not less than 19 carbon atoms (for example, microcrystalline wax) is used as a lubricant, and an alkylamine ethylene oxide adduct having a molecular weight of not less than 350 is used as an antistatic agent.

    摘要翻译： 在使用期间不释放气态有机材料的材料被用作干式密封材料，例如在将空气过滤器安装到天花板等的开口上时设置的垫圈，填充并用于间隙中的湿式密封材料 连接壁材料或隔板，氯乙烯片或氯乙烯布作为墙壁和地板的面材。 具体地说，使用分子量不小于400的羧酸酯作为增塑剂，使用分子量不低于300的酚类化合物作为抗氧化剂，不少于19个碳原子的脂族烃（对于 例如微晶蜡）用作润滑剂，并且使用分子量不小于350的烷基胺环氧乙烷加合物作为抗静电剂。

    Wet sealing materials and building components useful for clean rooms and local facilities
    8.
    发明授权
    Wet sealing materials and building components useful for clean rooms and local facilities 失效
    湿密封材料和建筑部件可用于洁净室和当地设施

    公开(公告)号：US06613835B1

    公开(公告)日：2003-09-02

    申请号：US09498044

    申请日：2000-02-04

    申请人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    发明人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    IPC分类号： C08K300

    CPC分类号： C09K3/1009 ,  C09K3/10 ,  C09K3/1021 ,  C09K2200/0405 ,  C09K2200/0411 ,  C09K2200/0441 ,  C09K2200/0447 ,  C09K2200/0635 ,  C09K2200/0687

    摘要： Materials not releasing gaseous organic materials during use are used as a dry-type sealing material such as a gasket disposed upon mounting an air filter to an opening of a ceiling or the like, a wet-type sealing material filled and used in a gap for connecting wall materials or partitionings, a vinyl chloride sheet or a vinyl chloride cloth as a facing material for walls and floors. Specifically, a carboxylic acid ester having a molecular weight of not less than 400 is used as a plasticizer, a phenolic compound having a molecular weight of not less 300 is used as an antioxidant, an aliphatic hydrocarbon having not less than 19 carbon atoms (for example, microcrystalline wax) is used as a lubricant, and an alkylamine ethylene oxide adduct having a molecular weight of not less than 350 is used as an antistatic agent.

    摘要翻译： 在使用期间不释放气态有机材料的材料被用作干式密封材料，例如在将空气过滤器安装到天花板等的开口上时设置的垫圈，填充并用于间隙中的湿式密封材料 连接壁材料或隔板，氯乙烯片或氯乙烯布作为墙壁和地板的面材。 具体地说，使用分子量不小于400的羧酸酯作为增塑剂，使用分子量不低于300的酚类化合物作为抗氧化剂，不少于19个碳原子的脂族烃（对于 例如微晶蜡）用作润滑剂，并且使用分子量不小于350的烷基胺环氧乙烷加合物作为抗静电剂。

    Air filter, local facility, and clean room
    9.
    发明授权
    Air filter, local facility, and clean room 有权
    空气过滤器，本地设施和洁净室

    公开(公告)号：US06293982B1

    公开(公告)日：2001-09-25

    申请号：US09405756

    申请日：1999-09-27

    申请人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    发明人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    IPC分类号： B01D4600

    CPC分类号： B01D46/0001 ,  B01D39/10 ,  B01D39/1623 ,  B01D39/2017 ,  B01D46/06 ,  B01D46/10 ,  B01D2239/04 ,  B01D2239/0428 ,  B01D2239/0457 ,  B01D2239/0464 ,  B01D2239/0492 ,  B01D2239/0618 ,  B01D2239/086 ,  B01D2239/10 ,  B01D2271/02 ,  B01D2279/51 ,  D04H1/4218 ,  D06M13/02 ,  D06M13/11 ,  D06M13/148 ,  D06M13/224 ,  D06M15/227 ,  D06M15/507 ,  F24F3/161 ,  F24F13/28

    摘要： A material not releasing gaseous organic substances during use is used as a filter medium and a sealing material for tightly sealing between the medium and a frame. Specifically, a synthetic paraffin not containing an aliphatic hydrocarbon having not more than 19 carbon atoms or less is used as a non-silicone type water repellent contained in a treatment agent for forming fibers into a cloth-like filter medium. A carboxylic acid ester having 400 or more molecular weight is used as a plasticizer and a phenolic compound having 300 or more molecular weight is used as an antioxidant to be added to the treatment agent and the sealing material. This enables that the gaseous organic substances are not present in a clean room, in a semiconductor production apparatus or in the like. Further, if the filter medium and the sealing material are formed of a material not releasing organic phosphorus compounds and boron compounds in the air, a clean room and a local facility particularly suitable for use in the production of semiconductors are provided.

    摘要翻译： 使用在使用期间不释放气态有机物质的材料用作过滤介质和用于在介质和框架之间紧密密封的密封材料。 具体地说，不含有不超过19个碳原子的脂肪族烃的合成石蜡用作用于将纤维形成布状过滤介质的处理剂中所含的非硅氧烷型防水剂。 使用具有400以上分子量的羧酸酯作为增塑剂，使用具有300以上分子量的酚类化合物作为添加到处理剂和密封材料中的抗氧化剂。 这使得气体有机物质不存在于洁净室，半导体制造装置等中。 此外，如果过滤介质和密封材料由空气中不释放有机磷化合物和硼化合物的材料形成，则提供特别适合用于制造半导体的洁净室和本地设备。

    Sealing materials and building components useful for clean rooms
    10.
    发明授权
    Sealing materials and building components useful for clean rooms 失效
    密封材料和建筑部件可用于洁净室

    公开(公告)号：US5869560A

    公开(公告)日：1999-02-09

    申请号：US685428

    申请日：1996-07-24

    申请人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    发明人： Sadao Kobayashi ,  Masayuki Imafuku ,  Yoshihide Wakayama

    IPC分类号： C09K3/10 ,  C08L27/06 ,  C08K5/02

    CPC分类号： C09K3/1009 ,  C09K3/10 ,  C09K3/1021 ,  C09K2200/0405 ,  C09K2200/0411 ,  C09K2200/0441 ,  C09K2200/0447 ,  C09K2200/0635 ,  C09K2200/0687

    摘要： Materials not releasing gaseous organic materials during use are used as a dry-type sealing material such as a gasket disposed upon mounting an air filter to an opening of a ceiling or the like, a wet-type sealing material filled and used in a gap for connecting wall materials or partitionings, a vinyl chloride sheet or a vinyl chloride cloth as a facing material for walls and floors. Specifically, a carboxylic acid ester having a molecular weight of not less than 400 is used as a plasticizer, a phenolic compound having a molecular weight of not less 300 is used as an antioxidant, an aliphatic hydrocarbon having not less than 19 carbon atoms (for example, microcrystalline wax) is used as a lubricant, and an alkylamine ethylene oxide adduct having a molecular weight of not less than 350 is used as an antistatic agent.

    摘要翻译： 在使用期间不释放气态有机材料的材料被用作干式密封材料，例如在将空气过滤器安装到天花板等的开口上时设置的垫圈，填充并用于间隙中的湿式密封材料 连接壁材料或隔板，氯乙烯片或氯乙烯布作为墙壁和地板的面材。 具体地说，使用分子量不小于400的羧酸酯作为增塑剂，使用分子量不低于300的酚类化合物作为抗氧化剂，不少于19个碳原子的脂族烃（对于 例如微晶蜡）用作润滑剂，并且使用分子量不小于350的烷基胺环氧乙烷加合物作为抗静电剂。