发明授权
US6091252A Method, apparatus and system for testing bumped semiconductor components
有权
用于测试碰撞半导体元件的方法,装置和系统
- 专利标题: Method, apparatus and system for testing bumped semiconductor components
- 专利标题(中): 用于测试碰撞半导体元件的方法,装置和系统
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申请号: US312381申请日: 1999-05-14
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公开(公告)号: US6091252A公开(公告)日: 2000-07-18
- 发明人: Salman Akram , Warren M. Farnworth , Alan G. Wood , David R. Hembree
- 申请人: Salman Akram , Warren M. Farnworth , Alan G. Wood , David R. Hembree
- 申请人地址: ID Boise
- 专利权人: Micron Technolopgy, Inc.
- 当前专利权人: Micron Technolopgy, Inc.
- 当前专利权人地址: ID Boise
- 主分类号: G01R1/04
- IPC分类号: G01R1/04 ; G01R1/067 ; G01R1/073 ; G01R31/28 ; G01R1/06 ; G01R31/26
摘要:
A method, apparatus and system for establishing temporary electrical communication with semiconductor components having contact bumps are provided. The apparatus includes an interconnect having patterns of contact members adapted to electrically contact the contact bumps. Each contact member includes an array of one or more electrically conductive projections in electrical communication with an associated conductor. The projections form contact members for retaining individual contact bumps on the semiconductor components. The projections can be pillars having angled faces covered with a conductive layer. Alternately the projections can be a material deposited on the substrate, or can be microbumps formed on multi layered tape bonded to the substrate. The interconnect can be employed in a wafer level test system for testing dice contained on a wafer, or in a die level test system for testing bare bumped dice or bumped chip scale packages.
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