发明授权
US6126790A Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet 有权
用多线圈电磁铁磁性取向薄磁膜的方法

Method of magnetically orienting thin magnetic films with a
multiple-coil electromagnet
摘要:
An electromagnet assembly magnetically orients a thin magnetic film deposited onto a surface of a substrate. The magnetic orientation can take place in a low-pressure processing environment such as during the deposition of the thin magnetic film or during a subsequent operation such as annealing. The electromagnet assembly includes a plate-shaped core located adjacent to the substrate and two or more electromagnetic coils that are wrapped in different directions around the core. Electrical currents conveyed through the electromagnetic coils are controlled for orienting a substantially uniaxial magnetic field throughout a range of angular positions in a plane of the substrate surface.
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