Invention Grant
- Patent Title: Methods and apparatus for controlled-angle wafer immersion
- Patent Title (中): 受控角晶片浸没的方法和装置
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Application No.: US09872341Application Date: 2001-05-31
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Publication No.: US06551487B1Publication Date: 2003-04-22
- Inventor: Jonathan D. Reid , Steven T. Mayer , Seshasayee Varadarajan , David C. Smith , Evan E. Patton , Dinesh S. Kalakkad , Gary Lind
- Applicant: Jonathan D. Reid , Steven T. Mayer , Seshasayee Varadarajan , David C. Smith , Evan E. Patton , Dinesh S. Kalakkad , Gary Lind
- Main IPC: C25D500
- IPC: C25D500

Abstract:
The orientation of a wafer with respect to the surface of an electrolyte is controlled during an electroplating process. The wafer is delivered to an electrolyte bath along a trajectory normal to the surface of the electrolyte. Along this trajectory, the wafer is angled before entry into the electrolyte for angled immersion. A wafer can be plated in an angled orientation or not, depending on what is optimal for a given situation. Also, in some designs, the wafer's orientation can be adjusted actively during immersion or during electroplating, providing flexibility in various electroplating scenarios.
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