- 专利标题: On chip alpha-particle detector
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申请号: US10246136申请日: 2002-09-18
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公开(公告)号: US06645789B2公开(公告)日: 2003-11-11
- 发明人: Kerry Bernstein , Andres Bryant , Wayne J. Howell , William A. Klaasen , Wilbur D. Pricer , Anthony K. Stamper
- 申请人: Kerry Bernstein , Andres Bryant , Wayne J. Howell , William A. Klaasen , Wilbur D. Pricer , Anthony K. Stamper
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
An IC chip comprising, a nearby or remote source capable of particle emissions; circuitry formed in the IC chip that is adversely affected by impacts of particle emissions from said source; and a particle detector formed in the IC chip between the circuitry and source for detecting said particle emissions. In one embodiment of the present invention, the source comprises a solder ball that is formed on a surface of the IC chip, and the solder ball is capable of emitting alpha-particles. The particle emissions detector of the present invention is a reverse biased Schottky diode. The IC chip is formed by (a) providing an IC chip having at least one layer of particle sensitive circuitry formed therein; (b) forming another layer having at least one particle sensor region situated therein on a surface of said IC chip; and (c) optionally, forming at least one particle emission source over said another layer.
公开/授权文献
- US20030020128A1 On chip alpha-particle detector 公开/授权日:2003-01-30